EP 1322941 A2 20030702 - DEFECT SOURCE IDENTIFIER
Title (en)
DEFECT SOURCE IDENTIFIER
Title (de)
IDENTIFIZIERER FÜR DEFEKTQUELLEN
Title (fr)
IDENTIFICATEUR DE SOURCES DE D FAUTS
Publication
Application
Priority
- US 0131029 W 20011002
- US 23729700 P 20001002
- US 90560701 A 20010713
Abstract (en)
[origin: WO0229392A2] A method and associated apparatus of analyzing defects on semiconductor wafers. The method includes identifying defects on the semiconductor wafer. Defect inspection information is created within a defect source identifier client. The defect inspection information containing information regarding the identified defects. The defect inspection information is transmitted through a network to a defect source identifier server. Defect source information is derived at the defect source identifier server in response to the defect inspection information. The defect source information is transmitted from the defect source identifier server to the defect source identifier client. The defect source information is utilized at the defect source identifier client. In one aspect, the utilizing the defect solution information involves displaying defect solutions to the defect at the defect source identifier client in response to the defect solution information. In another aspect, utilizing the defect solution information involves altering the operation of the wafer processing system.
IPC 1-7
IPC 8 full level
H01L 21/66 (2006.01)
CPC (source: EP KR)
H01L 22/20 (2013.01 - EP KR)
Citation (search report)
See references of WO 0229392A2
Designated contracting state (EPC)
AT BE CH CY DE FR GB IT LI NL
DOCDB simple family (publication)
WO 0229392 A2 20020411; WO 0229392 A3 20020606; CN 1398348 A 20030219; EP 1322941 A2 20030702; KR 20020063582 A 20020803; TW I256468 B 20060611
DOCDB simple family (application)
US 0131029 W 20011002; CN 01802992 A 20011002; EP 01977451 A 20011002; KR 20027007062 A 20020601; TW 90124340 A 20011002