EP 1325304 A1 20030709 - AFTERGLOW EMISSION SPECTROSCOPY MONITOR
Title (en)
AFTERGLOW EMISSION SPECTROSCOPY MONITOR
Title (de)
NACHGLÜHEMISSIONSSPEKTROSKOPIEÜBERWACHUNGS-VORRICHTUNG
Title (fr)
MONITEUR DE SPECTROSCOPIE D'EMISSION A LUEUR DE POST-DECHARGE
Publication
Application
Priority
- US 0128271 W 20010910
- US 23158800 P 20000911
- US 26676301 P 20010205
Abstract (en)
[origin: WO0223160A1] Afterglow spectroscopy allows observing light emission of gaseous species in absence of direct plasma light. This absence avoids the creation of a background sprectrum obscuring weak emission from trace species. The geometry of the invention prevents direct plasma light (3) from reaching the observation window (10) while a lens (10) focues afterglow emission light on the entrance of a photo multiplier (11). The invention describes a flowing afterglow version monitoring in-situ the cleanup of vacuum tools during pump/purge cycles. The invention also describes an intermittent afterflow version siutable for trace gas analysis at atmospheric pressure.
IPC 1-7
IPC 8 full level
G01N 21/68 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP)
G01N 21/68 (2013.01); H01J 37/32935 (2013.01); H01J 37/32972 (2013.01)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0223160 A1 20020321; AU 9260301 A 20020326; EP 1325304 A1 20030709; EP 1325304 A4 20060517
DOCDB simple family (application)
US 0128271 W 20010910; AU 9260301 A 20010910; EP 01972976 A 20010910