EP 1328966 A2 20030723 - SYSTEM AND METHOD TO CONTROL RADIAL DELTA TEMPERATURE
Title (en)
SYSTEM AND METHOD TO CONTROL RADIAL DELTA TEMPERATURE
Title (de)
SYSTEM UND VERFAHREN ZUR KONTROLLE RADIALER TEMPERATURUNTERSCHIEDE
Title (fr)
SYSTEME ET PROCEDE REGULATION DE DIFFERENCE DE TEMPERATURE RADIALE
Publication
Application
Priority
- US 0207034 W 20020308
- US 27453201 P 20010308
- US 6812702 A 20020206
Abstract (en)
[origin: WO02073660A2] A system and method of minimizing stress related to the ramp rate of variable by limiting the ramp rate as a function of the current value of the variable is provided. More specifically, the present invention provides a system and method of maintaining the radial delta temperature of a semiconductor substrate or other heated body below the crystal slip curve by dynamically controlling the temperature ramp rate during processing.
IPC 1-7
IPC 8 full level
H01L 21/22 (2006.01); F27B 17/00 (2006.01); F27D 19/00 (2006.01); F27D 21/00 (2006.01); H01L 21/00 (2006.01); H01L 21/205 (2006.01)
CPC (source: EP)
F27B 17/0025 (2013.01); F27D 19/00 (2013.01); F27D 21/0014 (2013.01); H01L 21/67248 (2013.01); F27D 2019/0003 (2013.01)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02073660 A2 20020919; WO 02073660 A3 20030213; AU 2002242327 A1 20020924; CN 1459017 A 20031126; EP 1328966 A2 20030723; EP 1328966 A4 20060830; JP 2004519855 A 20040702
DOCDB simple family (application)
US 0207034 W 20020308; AU 2002242327 A 20020308; CN 02800595 A 20020308; EP 02707964 A 20020308; JP 2002572612 A 20020308