EP 1332106 A2 20030806 - METHOD FOR PRODUCING GLASS-SILICON-GLASS SANDWICH STRUCTURES
Title (en)
METHOD FOR PRODUCING GLASS-SILICON-GLASS SANDWICH STRUCTURES
Title (de)
VERFAHREN ZUM HERSTELLEN VON GLAS-SILIZIUM-GLAS SANDWICHSTRUKTUREN
Title (fr)
PROCEDE DE PRODUCTION DE STRUCTURES SANDWICH VERRE-SILICIUM-VERRE
Publication
Application
Priority
- DE 0104141 W 20011107
- DE 10055155 A 20001107
Abstract (en)
[origin: WO0238490A2] The invention relates to a method for producing glass-silicon-glass sandwich structures which are connected irreversibly and in such a way that they are adjusted to correspond. Said structures consist of a bottom and a top glass substrate (2, 3) and a silicon substrate (1) in-between. At least one of the substrates (1; 2; 3) is provided with 3D depth structuring. The aim of the invention is to provide a low-cost production method, especially with a view to mass production of glass-silicon-glass sandwich structures. To this end, the silicon substrate (1) is irreversibly connected to one of the glass substrates (2; 3) before or after the 3D depth structuring. The bond is reduced to a predetermined end thickness from the glass and/or the silicon side by means of grinding, etching and polishing methods and the remaining silicon surface is then connected to a second glass substrate (3; 2) by anodic bonding.
IPC 1-7
IPC 8 full level
CPC (source: EP)
B81B 1/00 (2013.01); B81C 1/00357 (2013.01); B81C 2201/019 (2013.01)
Citation (search report)
See references of WO 0238490A2
Designated contracting state (EPC)
AT DE
DOCDB simple family (publication)
WO 0238490 A2 20020516; WO 0238490 A3 20020815; EP 1332106 A2 20030806
DOCDB simple family (application)
DE 0104141 W 20011107; EP 01993578 A 20011107