EP 1332516 A1 20030806 - METHOD FOR APPLYING A SUBSTRATE
Title (en)
METHOD FOR APPLYING A SUBSTRATE
Title (de)
VERFAHREN ZUM AUFBRINGEN EINES SUBSTRATS
Title (fr)
PROCEDE POUR L'APPLICATION D'UN SUBSTRAT
Publication
Application
Priority
- DE 10052293 A 20001020
- EP 0111897 W 20011015
Abstract (en)
[origin: DE10052293A1] A substrate (4) fits with a gap and is curved in relation to a protective layer (5). As it is laid on, the substrate exerts almost constant pressure on the protective layer. Air or liquid is applied as pressure to the substrate's side turned away from the protective layer. Controlling the pressure of the air or liquid in the hollow space between the substrate and a carrier body (2) causes the substrate to arch and be released from the carrier body.
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01); H01L 21/302 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01)
CPC (source: EP US)
B32B 37/0007 (2013.01 - EP US); B32B 38/1866 (2013.01 - EP US); H01L 21/67132 (2013.01 - EP US); H01L 21/6835 (2013.01 - EP US); H01L 21/6838 (2013.01 - EP US)
Citation (search report)
See references of WO 0235591A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
DE 10052293 A1 20020425; AU 2063202 A 20020506; EP 1332516 A1 20030806; US 2002062921 A1 20020530; US 6841027 B2 20050111; WO 0235591 A1 20020502
DOCDB simple family (application)
DE 10052293 A 20001020; AU 2063202 A 20011015; EP 0111897 W 20011015; EP 01988946 A 20011015; US 72735400 A 20001130