EP 1335187 B1 20111012 - Rotation-type decoupled microelectromechanical (MEMS) gyroscope
Title (en)
Rotation-type decoupled microelectromechanical (MEMS) gyroscope
Title (de)
Entkoppeltes mikroelektromechanisches (MEMS) Rotations-Gyroskop
Title (fr)
Gyroscope rotatif de découplage de système micro-électromécanique (MEMS)
Publication
Application
Priority
KR 20020007244 A 20020208
Abstract (en)
[origin: EP1335187A1] A rotation-type decoupled MEMS gyroscope including a drive body (10) movable about the X-axis, a sensing body (30) movable about the Z-axis, a medium body (20) moving together with the drive body about the X-axis and the sensing body about the Z-axis. The drive body is fixed on a substrate (100) by a first torsion spring (51) torsion-deformed about the X-axis, and the medium body is connected to the drive body by a first bending spring (61) bending-deformed about the Z-axis. The sensing body is connected to the medium body by a second torsion spring (52) torsion-deformed about the X-axis and fixed to the substrate by a second bending spring (62) bending-deformed about the Z-axis. If angular velocity is applied relative to the Y-axis while the drive body vibrates in a certain range about the X-axis by a driving electrode (110), the sensing body rotates about the Z-axis by the Coriolis force and a sensing electrode (130) senses the rotation. <IMAGE>
IPC 8 full level
B81B 5/00 (2006.01); G01C 19/56 (2012.01); G01C 19/5712 (2012.01)
CPC (source: EP KR US)
G01C 19/56 (2013.01 - KR); G01C 19/5712 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB SE
DOCDB simple family (publication)
EP 1335187 A1 20030813; EP 1335187 B1 20111012; JP 2003247831 A 20030905; JP 4368116 B2 20091118; KR 100431004 B1 20040512; KR 20030067791 A 20030819; US 2003164041 A1 20030904; US 6796178 B2 20040928
DOCDB simple family (application)
EP 03002837 A 20030207; JP 2003032910 A 20030210; KR 20020007244 A 20020208; US 35927203 A 20030206