EP 1336076 A1 20030820 - METHOD AND DEVICE FOR ANALYSING THE SURFACE OF A SUBSTRATE
Title (en)
METHOD AND DEVICE FOR ANALYSING THE SURFACE OF A SUBSTRATE
Title (de)
VERFAHREN UND EINRICHTUNG ZUR ANALYSE DER OBERFLÄCHE EINES SUBSTRATS
Title (fr)
PROCEDE ET DISPOSITIF D'ANALYSE DE LA SURFACE D'UN SUBSTRAT
Publication
Application
Priority
- FR 0103658 W 20011121
- FR 0015050 A 20001122
Abstract (en)
[origin: WO0242715A1] The invention concerns a method for analysing a substrate (2) surface which consists in providing a reflection image of at least a target (1) on said surface, retrieving by digital processing local phases along two directions. The invention is characterised in that it consists in calculating by digital processing based on the local phases, local slope variations to deduce therefrom curvature variations or altitude variations of said surface.
IPC 1-7
IPC 8 full level
G01B 11/30 (2006.01); G01B 11/24 (2006.01); G01B 11/25 (2006.01); G01N 21/896 (2006.01); G01N 21/956 (2006.01); G01N 21/958 (2006.01)
CPC (source: EP KR US)
G01B 11/25 (2013.01 - EP US); G01B 11/30 (2013.01 - KR); G01N 21/956 (2013.01 - EP US); G01N 21/958 (2013.01 - EP US)
Citation (search report)
See references of WO 0242715A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0242715 A1 20020530; AU 1839302 A 20020603; BR 0115538 A 20030902; CN 100371677 C 20080227; CN 1568419 A 20050119; EP 1336076 A1 20030820; FR 2817042 A1 20020524; FR 2817042 B1 20030620; JP 2004514882 A 20040520; KR 20030045196 A 20030609; US 2006050284 A1 20060309; US 7430049 B2 20080930
DOCDB simple family (application)
FR 0103658 W 20011121; AU 1839302 A 20011121; BR 0115538 A 20011121; CN 01819300 A 20011121; EP 01997186 A 20011121; FR 0015050 A 20001122; JP 2002544607 A 20011121; KR 20037006762 A 20030519; US 43226904 A 20040405