EP 1336189 A1 20030820 - DEVICE, SET AND METHOD FOR CARRYING A GAS OR A LIQUID TO A SURFACE THROUGH A TUBE
Title (en)
DEVICE, SET AND METHOD FOR CARRYING A GAS OR A LIQUID TO A SURFACE THROUGH A TUBE
Title (de)
VORRICHTUNG, SET UND VERFAHREN ZUR ZUFÜHRUNG EINES GASES ODER EINER FLÜSSIGKEIT DURCH EIN ROHR AN EINE OBERFLÄCHE
Title (fr)
DISPOSITIF, ENSEMBLE ET PROCEDE POUR ACHEMINER UN GAZ OU UN LIQUIDE AU NIVEAU D'UNE SURFACE A TRAVERS UN TUYAU
Publication
Application
Priority
- DE 10042098 A 20000826
- EP 0109745 W 20010823
Abstract (en)
[origin: WO0219375A1] The invention relates to a device, to a set of tubes and to a method for carrying a gas or a liquid to a surface through a tube, especially in order to produce gas mixtures or to treat the surface using gas lithography. The tube or in the case of a set, each tube of the set has an inlet opening and an outlet opening. A shaft is allocated to each tube, this shaft being arranged in the axial direction of the tube and being displaceable in its longitudinal direction in relation to the tube, from a first position to a second position and vice versa. Each shaft bears a blocking body which blocks or unblocks the outlet when the shaft is in the first or second position. A gas reservoir and a supply line by which means the inside of the gas reservoir is connected to the inlet opening of each tube are also allocated to each tube, so that gas is able to flow from the inside of the gas reservoir into the tube.
IPC 1-7
IPC 8 full level
C23C 16/455 (2006.01); C23F 4/00 (2006.01); H01J 37/305 (2006.01); H01J 37/317 (2006.01); H01L 21/027 (2006.01); H01L 21/205 (2006.01); H05K 3/08 (2006.01)
CPC (source: EP US)
H01J 37/3056 (2013.01 - EP US); H01J 37/3178 (2013.01 - EP US); H01J 2237/006 (2013.01 - EP US); H01J 2237/31744 (2013.01 - EP US)
Citation (search report)
See references of WO 0219375A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0219375 A1 20020307; DE 10042098 A1 20020314; EP 1336189 A1 20030820; JP 2004508460 A 20040318; US 2004173759 A1 20040909
DOCDB simple family (application)
EP 0109745 W 20010823; DE 10042098 A 20000826; EP 01969635 A 20010823; JP 2002524183 A 20010823; US 36218003 A 20030627