EP 1337694 A1 20030827 - METHOD OF MANUFACTURE OF COLLOIDAL ROD PARTICLES AS NANOBARCODES
Title (en)
METHOD OF MANUFACTURE OF COLLOIDAL ROD PARTICLES AS NANOBARCODES
Title (de)
VERFAHREN ZUR HERSTELLUNG VON KOLLOIDALEN STABTEILCHEN ALS NANOBARCODES
Title (fr)
PROCEDE DE FABRICATION DE PARTICULES COLLOIDALES DE TYPE TIGE SOUS FORME DE NANO CODES-BARRES
Publication
Application
Priority
- US 0130729 W 20011002
- US 67720300 A 20001002
- US 23732200 P 20001002
- US 28501701 P 20010419
Abstract (en)
[origin: WO0229136A1] A method is disclosed for the manufacture of colloidal rod particles as nanobarcodes. Figure 3 shows an embodiment of the invention using a four-layer stack on a silicon wafer substrate (101). the substrate (101) is overlaid with conductive layer (102), polymeric layer (103), etch stop layer (104) and photoresist layer (105). Pores (106) are fomed following exposure and development of the photoresist and etching down to the etch stop layer. Pores (107) are fomred by a further etching down through polymer layer (103). Nanoparticles (108) are formed within pores (107) by electrochemical deposition using the conductive layer (102) as the plating electrode. The free-standing nanoparticles (109) are formed by subsequent dissolving of conductive layer (102) forming the nanobarcodes.
IPC 1-7
IPC 8 full level
B01J 19/00 (2006.01); C25D 1/00 (2006.01); C40B 70/00 (2006.01)
CPC (source: EP)
B01J 19/0046 (2013.01); B82Y 25/00 (2013.01); B82Y 30/00 (2013.01); C25D 1/00 (2013.01); C25D 1/006 (2013.01); G01N 33/54346 (2013.01); B01J 2219/005 (2013.01); B01J 2219/00502 (2013.01); B01J 2219/00547 (2013.01); B01J 2219/00585 (2013.01); B01J 2219/00596 (2013.01); C40B 70/00 (2013.01)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0229136 A1 20020411; AU 9646001 A 20020415; EP 1337694 A1 20030827; EP 1337694 A4 20040915
DOCDB simple family (application)
US 0130729 W 20011002; AU 9646001 A 20011002; EP 01977334 A 20011002