EP 1339622 A2 20030903 - WAFER CARRIER WITH STACKING ADAPTOR PLATE
Title (en)
WAFER CARRIER WITH STACKING ADAPTOR PLATE
Title (de)
WAFERTRÄGER MIT STAPELADAPTERPLATTE
Title (fr)
PORTE-PLAQUETTE AVEC PLAQUE ADAPTATRICE D'EMPILAGE
Publication
Application
Priority
- US 0146538 W 20011204
- US 25102500 P 20001204
Abstract (en)
[origin: WO0247118A2] A front opening wafer container has a container portion with a transparent shell and a door to close the open front. The container portion has a machine interface on the bottom of the shell, such as a kinematic coupling, and a receptacle at the top of the shell to receive an accessories, in particular a robotic lifting flange or an adaptor plate. The adaptor plate will ideally have a cooperating machine interface portions to allow stacking of the wafer carriers. The receptacle has, in preferred embodiments, sliding support guides with undercut portions for retention of the robotic lifting flange or the adaptor plate. The accessory will ideally have a detent positioned on the accessories to releasably lock said accessory in place on the container portion.
[origin: WO0247118A2] A front opening wafer container (30) has a container portion (32) with a transparent shell and a door (34) to close the open front. The container portion (32) has a machine interface on the bottom of the shell, such as a kinematic coupling (56), and a receptacle (73) at the top of the shell to receive an accessories, in particular a robotic lifting flange or an adaptor plate (50). The adaptor plate (50) will ideally have a cooperating machine interface portions to allow stacking of the wafer carriers. The receptacle (73) has, in preferred embodiments, sliding support guides (72, 74) with undercut portions (75) for retention of the robotic lifting flange or the adaptor plate (50). The accessory will ideally have a detent positioned on the accessories to releasably lock said accessory in place on the container portion (32).
IPC 1-7
IPC 8 full level
B65D 21/02 (2006.01); B65D 85/00 (2006.01); B65D 85/30 (2006.01); B65D 85/48 (2006.01); B65D 85/86 (2006.01); B65G 49/07 (2006.01); H01L 21/673 (2006.01); H01L 21/68 (2006.01)
CPC (source: EP KR US)
H01L 21/67379 (2013.01 - EP US); H01L 21/68 (2013.01 - KR)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
WO 0247118 A2 20020613; WO 0247118 A3 20021017; WO 0247118 B1 20030306; AU 3769702 A 20020618; CN 1218364 C 20050907; CN 1478293 A 20040225; EP 1339622 A2 20030903; EP 1339622 A4 20060308; JP 2004515916 A 20040527; KR 20040019264 A 20040305; US 2002114686 A1 20020822
DOCDB simple family (application)
US 0146538 W 20011204; AU 3769702 A 20011204; CN 01819931 A 20011204; EP 01986506 A 20011204; JP 2002548751 A 20011204; KR 20037007319 A 20030530; US 518801 A 20011204