EP 1340052 A1 20030903 - FLOW SENSOR
Title (en)
FLOW SENSOR
Title (de)
STRÖMUNGSSENSOR
Title (fr)
CAPTEUR D'ECOULEMENT
Publication
Application
Priority
- DE 0103906 W 20011011
- DE 10058009 A 20001123
Abstract (en)
[origin: WO0242723A1] The invention relates to a flow sensor (5), in particular for analysing gas flows. Said sensor comprises a support body (10) and at least one sensor component (15) that is sensitive to the flow of a medium. At least certain sections of the sensor component (15) are separated from the support body (10) by a zone with poor thermal conductivity in relation to said support body (10). In addition, the zone with poor thermal conductivity (11, 11`, 14) is a porous silicon zone (11) or a porous silicon oxide zone (11`), or said zone with poor thermal conductivity (11, 11`, 14) is a recess (14) in the surface of the support body (10), over which the sensor component (15) is positioned on at least one substantially self-supporting strip (13) that extends over the recess (14). The inventive flow sensor (5) is particularly suitable for the angular detection of a gas flow.
IPC 1-7
IPC 8 full level
G01P 5/12 (2006.01); G01F 1/684 (2006.01); G01F 1/692 (2006.01)
CPC (source: EP US)
G01F 1/6845 (2013.01 - EP US)
Citation (search report)
See references of WO 0242723A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 0242723 A1 20020530; DE 10058009 A1 20020606; EP 1340052 A1 20030903; JP 2004514153 A 20040513; US 2004069626 A1 20040415; US 7040160 B2 20060509
DOCDB simple family (application)
DE 0103906 W 20011011; DE 10058009 A 20001123; EP 01997679 A 20011011; JP 2002544615 A 20011011; US 43254203 A 20030929