EP 1340918 A1 20030903 - Turbomolecular pump
Title (en)
Turbomolecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbo-moléculaire
Publication
Application
Priority
JP 2002053198 A 20020228
Abstract (en)
A pump apparatus in accordance with the present invention is used to discharge a process gas from, for example, a semiconductor manufacturing system, and is constructed so that a rotor is pivotally supported by a magnetic bearing (8,10,12). To decrease the solidification and deposition of process gas in a tube of the pump apparatus, heat is generated in a bearing electromagnet of magnetic bearing to keep the temperature of tube at a high temperature. Heat is generated in the bearing electromagnet, for example, by causing a bias current to flow together with a control current, or by causing a high frequency current to flow. Also, a motor (10) is heated by repeating the increase and decrease of rotational speed of motor (10), whereby the temperature of tube can be raised. <IMAGE>
IPC 1-7
IPC 8 full level
F04D 27/00 (2006.01); F04B 49/06 (2006.01); F04D 19/04 (2006.01); F04D 29/00 (2006.01); F04D 29/02 (2006.01); F04D 29/04 (2006.01); F04D 29/05 (2006.01); F04D 29/056 (2006.01); F04D 29/058 (2006.01); F04D 29/54 (2006.01); F04D 29/58 (2006.01)
CPC (source: EP KR US)
F04D 19/04 (2013.01 - KR); F04D 19/048 (2013.01 - EP US); F04D 25/06 (2013.01 - EP US); F04D 29/5806 (2013.01 - EP US); F04D 29/584 (2013.01 - EP US); F05D 2260/607 (2013.01 - EP US)
Citation (search report)
- [X] US 6123522 A 20000926 - KUBO ATSUSHI [JP], et al
- [X] EP 1178217 A2 20020206 - SEIKO INSTR INC [JP]
- [X] US 5961291 A 19991005 - SAKAGAMI SEIJI [JP], et al
- [X] EP 0967394 A1 19991229 - SEIKO SEIKI KK [JP]
- [A] EP 0694699 A1 19960131 - EBARA CORP [JP]
DOCDB simple family (publication)
EP 1340918 A1 20030903; JP 2003254285 A 20030910; KR 20030071525 A 20030903; US 2003161733 A1 20030828
DOCDB simple family (application)
EP 03251052 A 20030221; JP 2002053198 A 20020228; KR 20030011962 A 20030226; US 37098503 A 20030220