EP 1341643 A4 20040609 - POLISHING PADS WITH POLYMER FILLED FIBROUS WEB, AND METHODS FOR FABRICATING AND USING SAME
Title (en)
POLISHING PADS WITH POLYMER FILLED FIBROUS WEB, AND METHODS FOR FABRICATING AND USING SAME
Title (de)
POLIERKISSEN MIT MIT POLYMER GEFÜLLTER FASERBAHN UND VERFAHREN ZUR HERSTELLUNG UND VERWENDUNG DESSELBEN
Title (fr)
TAMPONS A POLIR MUNIS D'UNE NAPPE FIBREUSE POLYMERIQUE CHARGEE, ET PROCEDES DE FABRICATION ET D'UTILISATION DES TAMPONS
Publication
Application
Priority
- US 0143208 W 20011120
- US 71518400 A 20001120
Abstract (en)
[origin: WO02100593A2] A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.
IPC 1-7
IPC 8 full level
B24B 37/00 (2006.01); B24B 37/04 (2006.01); B24B 37/24 (2012.01); B24D 3/28 (2006.01); B24D 11/00 (2006.01); B24D 13/14 (2006.01); C08J 5/14 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP)
B24B 37/24 (2013.01); B24D 3/28 (2013.01); B24D 11/008 (2013.01)
Citation (search report)
- [X] US 4728552 A 19880301 - JENSEN JR ELMER W [US]
- See references of WO 02100593A2
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02100593 A2 20021219; WO 02100593 A3 20030605; AU 2001297847 A1 20021223; CA 2441419 A1 20021219; EP 1341643 A2 20030910; EP 1341643 A4 20040609; JP 2004528997 A 20040924
DOCDB simple family (application)
US 0143208 W 20011120; AU 2001297847 A 20011120; CA 2441419 A 20011120; EP 01274075 A 20011120; JP 2003503398 A 20011120