EP 1342071 A1 20030910 - IMAGING DEVICE FOR PERFORMING A METHOD OF CHARACTERISING THE SURFACE OF A SENSITIVE LAYER
Title (en)
IMAGING DEVICE FOR PERFORMING A METHOD OF CHARACTERISING THE SURFACE OF A SENSITIVE LAYER
Title (de)
BILDVORRICHTUNG ZUR DURCHFÜHRUNG EINES VERFAHRENS ZUR CHARAKTERISIERUNG DER OBERFLÄCHE EINER EMPFINDLICHEN SCHICHT
Title (fr)
DISPOSITIF D'IMAGERIE, PERMETTANT DE METTRE EN OEUVRE UN PROCÉDÉ DE CARACTÉRISATION DE LA SURFACE D'UNE COUCHE SENSIBLE
Publication
Application
Priority
- FR 0103991 W 20011213
- FR 0016247 A 20001213
- FR 0016248 A 20001213
Abstract (en)
[origin: WO0248689A1] The invention concerns a method for characterising the surface of a sensitive layer deposited on the base of an optical prism, said surface comprising active zones whereof the optical thickness is capable of varying with time, said method using a technique based on analysis of the reflective variation of the prism-sensitive layer interface. The method consists in causing: a collimated light beam with an angle of incidence enabling total reflection on the prism base to penetrate into the prism, said beam illuminating a fixed part of the interface corresponding to the part to be characterised; scanning at an angle so as to locate an incidence whereon the reflectivity of the active zones is minimal; determining an angle of incidence optimal for sensitivity of detection of the active zones; adjusting the incidence to the optimal value; and measuring the reflectivity with an imaging system. The invention also concerns a device for implementing said method.
IPC 1-7
IPC 8 full level
G01N 21/55 (2006.01)
CPC (source: EP US)
B82Y 15/00 (2013.01 - EP US); G01N 21/553 (2013.01 - EP US); G01N 21/552 (2013.01 - EP US)
Citation (search report)
See references of WO 0248689A1
Citation (examination)
LYON L A ET AL: "AN IMPROVED SURFACE PLASMON RESONANCE IMAGING APPARATUS", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 70, no. 4, 1 April 1999 (1999-04-01), pages 2076 - 2081, XP000875403, ISSN: 0034-6748, DOI: 10.1063/1.1149716
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0248689 A1 20020620; AU 1930402 A 20020624; CA 2431399 A1 20020620; CA 2431399 C 20090428; EP 1342071 A1 20030910; US 2007054392 A1 20070308; US 7678584 B2 20100316
DOCDB simple family (application)
FR 0103991 W 20011213; AU 1930402 A 20011213; CA 2431399 A 20011213; EP 01270759 A 20011213; US 59222106 A 20061103