EP 1344940 A1 20030917 - Vacuum pump
Title (en)
Vacuum pump
Title (de)
Vakuumpumpe
Title (fr)
Pompe à vide
Publication
Application
Priority
JP 2002069013 A 20020313
Abstract (en)
A heater 29 is mounted on the outer peripheral surface of a base 6 to heat the base 6. A heat shutoff wall 24b is provided on a motor housing 24 to prevent the radiation heat of the base 6 heated by the heater 29 from transferring to a pump inside substrate 25. A gap portion 27 is formed by providing a gap between the motor housing 24 and the base 6 to prevent the heat of the base 6 heated by the heater 29 from transferring to the motor housing 24. Also, a water cooled tube 28 is installed under the motor housing fixing portion 24c and cooling water is circulated in the tube to efficiently cool the pump inside substrate 25. By constructing a vacuum pump in this manner, the accumulation of solid product of process gas in the vacuum pump is restrained, and thus the pump inside substrate can be cooled efficiently. <IMAGE>
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/52 (2006.01); F04D 29/58 (2006.01)
CPC (source: EP KR US)
F04D 19/04 (2013.01 - EP KR US); F04D 29/5806 (2013.01 - EP US); F04D 29/5813 (2013.01 - EP US); F04D 29/584 (2013.01 - EP US); F04D 29/5853 (2013.01 - EP US); F05D 2260/607 (2013.01 - EP US)
Citation (search report)
- [XA] EP 0855517 A2 19980729 - PFEIFFER VACUUM GMBH [DE]
- [XA] EP 0694699 A1 19960131 - EBARA CORP [JP]
- [XA] US 4929151 A 19900529 - LONG JACQUES [FR], et al
- [A] US 4797062 A 19890110 - DETERS LUDGER [DE], et al
- [A] US 5577883 A 19961126 - SCHUETZ GUENTER [DE], et al
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 1344940 A1 20030917; JP 2003269369 A 20030925; KR 20030074304 A 20030919; US 2003175131 A1 20030918
DOCDB simple family (application)
EP 03251380 A 20030307; JP 2002069013 A 20020313; KR 20030014307 A 20030307; US 38518303 A 20030310