EP 1345734 A1 20030924 - CROSSLINKED POLYETHYLENE POLISHING PAD FOR CHEMICAL-MECHNICAL POLISHING AND POLISHING APPARATUS
Title (en)
CROSSLINKED POLYETHYLENE POLISHING PAD FOR CHEMICAL-MECHNICAL POLISHING AND POLISHING APPARATUS
Title (de)
POLIERKISSEN AUS VERNETZTEM POLYETHYLEN ZUM CHEMISCH-MECHANISCHEN POLIEREN UND POLIERVORRICHTUNG
Title (fr)
TAMPON DE POLISSAGE EN POLYETHYLENE RETICULE DESTINE A POLIR DE FACON CHIMICO-MECANIQUE ET APPAREIL DE POLISSAGE
Publication
Application
Priority
- US 0144177 W 20011127
- US 25029900 P 20001129
- US 30437501 P 20010710
- US 10101 A 20011024
IPC 1-7
IPC 8 full level
B24B 37/04 (2006.01); B24B 49/16 (2006.01); B24D 3/26 (2006.01); B24D 11/00 (2006.01); B24D 13/14 (2006.01)
Citation (search report)
See references of WO 0243922A1
Designated contracting state (EPC)
DE FR
DOCDB simple family (publication)
AU 1786702 A 20020611; CN 1484566 A 20040324; DE 60118963 D1 20060524; DE 60118963 T2 20061221; EP 1345734 A1 20030924; EP 1345734 B1 20060419
DOCDB simple family (application)
AU 1786702 A 20011127; CN 01821550 A 20011127; DE 60118963 T 20011127; EP 01998427 A 20011127