EP 1346779 B1 20070822 - Device for receiving a workpiece carrier and for supplying a first and a second fluid
Title (en)
Device for receiving a workpiece carrier and for supplying a first and a second fluid
Title (de)
Vorrichtung zur Aufnahme eines Werkstückträgers und zur Zuführung eines ersten und zweiten Mediums
Title (fr)
Dispositif pour recevoir un support de pièces et pour délivrer un premier et un second fluide
Publication
Application
Priority
DE 10212604 A 20020321
Abstract (en)
[origin: EP1346779A2] Device for receiving a workpiece support and for supplying a first and a second medium comprises a hollow axle with at least one inlet and one outlet (12) for the first medium, and a hollow shaft (20) with at least one inlet (21) and one outlet (22) for the second medium and rotatably positioned in the hollow axle. The inlet and outlet of the hollow axle open into a first channel (14) formed between the hollow axle and the hollow shaft. A second channel (26) is formed inside the hollow shaft. The device also comprises a distributor unit (30) for the first medium arranged in the region of the outlet of the hollow axle, a distributor unit (70) for the second medium arranged in the region of the outlet of the hollow shaft, and a receiving device (80) for a workpiece support arranged in the region of one end of the hollow shaft. An Independent claim is also included for a cleaning container with a housing having a recess for the above arrangement. Preferred Features: The first and second distributor units are rotatably arranged relative to the hollow axle. The hollow axle is rigidly arranged.
IPC 8 full level
B08B 3/02 (2006.01); B08B 3/06 (2006.01); F26B 11/12 (2006.01)
CPC (source: EP)
B08B 3/02 (2013.01); B08B 3/06 (2013.01); F26B 11/12 (2013.01)
Designated contracting state (EPC)
AT CH DE FR GB LI
DOCDB simple family (publication)
EP 1346779 A2 20030924; EP 1346779 A3 20050713; EP 1346779 B1 20070822; AT E370800 T1 20070915; DE 10212604 B3 20040122; DE 50307987 D1 20071004
DOCDB simple family (application)
EP 03004414 A 20030227; AT 03004414 T 20030227; DE 10212604 A 20020321; DE 50307987 T 20030227