EP 1348121 A1 20031001 - METHOD FOR PRODUCING THIN FILM SENSORS, ESPECIALLY HOT FILM ANEMOMETERS AND HUMIDITY SENSORS
Title (en)
METHOD FOR PRODUCING THIN FILM SENSORS, ESPECIALLY HOT FILM ANEMOMETERS AND HUMIDITY SENSORS
Title (de)
VERFAHREN ZUR HERSTELLUNG VON DÜNNSCHICHTSENSOREN, INSBESONDERE HEISSFILMANEMOMETERN UND FEUCHTESENSOREN
Title (fr)
PROCEDE DE FABRICATION DE CAPTEURS A COUCHE MINCE, EN PARTICULIER D'ANEMOMETRES A FILM CHAUD ET DE CAPTEURS D'HUMIDITE
Publication
Application
Priority
- DE 10063794 A 20001221
- EP 0114229 W 20011205
Abstract (en)
[origin: WO0250527A1] The invention relates to a method for producing thin film sensors. The aim of the invention is to provide a method for the economical and effective large scale production of thin film sensors. To this end, sensor structures are applied (S10) to a glass substrate and the front of the composite from the glass substrate and the sensor structures is immovably linked (S20) with a support. Large areas of the substrate material are then substantially removed (S31, S32, S33) from the back down to a final thickness (d) of the glass substrate. The optional steps of removal (S32; S33) serve to reduce the roughness of the back. The link between the support and the composite from the glass substrate and the sensor structures is then dissolved (S50). The inventive method is characterized in that comparatively thick glass substrates are coated, thereby substantially reducing the reject rate caused by breakage or deformation of the glass substrates, even if the glass substrates of the finished thin film sensors are very thin. The inventive method also allows increasing the degree of automation in the production of thin film sensors.
IPC 1-7
IPC 8 full level
B81C 1/00 (2006.01); G01F 1/692 (2006.01); G01N 27/12 (2006.01); G01N 27/22 (2006.01)
CPC (source: EP US)
G01F 1/692 (2013.01 - EP US); G01N 27/121 (2013.01 - EP US); G01N 27/223 (2013.01 - EP US)
Citation (search report)
See references of WO 0250527A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0250527 A1 20020627; DE 10063794 A1 20020627; EP 1348121 A1 20031001; US 2004113751 A1 20040617
DOCDB simple family (application)
EP 0114229 W 20011205; DE 10063794 A 20001221; EP 01271537 A 20011205; US 45158304 A 20040105