Global Patent Index - EP 1348946 A1

EP 1348946 A1 20031001 - Device and method for optical inspection

Title (en)

Device and method for optical inspection

Title (de)

Vorrichtung und Verfahren zur optischen Inspektion

Title (fr)

Dispositif et procédé d'inspection optique

Publication

EP 1348946 A1 20031001 (EN)

Application

EP 02445049 A 20020418

Priority

SE 0101374 A 20010419

Abstract (en)

The invention relates to a method for optical inspection with a scanner (3) which is arranged for detection and measurement of defects (13a-c) in or on a material (1) which is inspected, with said inspection taking place in successive sweeps essentially in the transverse direction of the material (1), with each respective sweep corresponding to a plurality of pixels in said scanner (3). The invention is characterized in that it comprises storage of a rolling buffer comprising at least one sweep which precedes the sweep which is stored, by means of at least one pixel indicating triggering corresponding to a detected defect (13a-c) in the material. The invention also relates to a device for such inspection. By means of the invention, an improved measurement accuracy is obtained when detecting defects using the measurement system described. <IMAGE>

IPC 1-7

G01N 21/88; G01N 21/89

IPC 8 full level

G01N 21/89 (2006.01)

CPC (source: EP US)

G01N 21/8903 (2013.01 - EP US)

Citation (search report)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

DOCDB simple family (publication)

EP 1348946 A1 20031001; EP 1348946 B1 20080924; AT E409312 T1 20081015; DE 60229036 D1 20081106; SE 0101374 D0 20010419; SE 0101374 L 20021020; US 2002154307 A1 20021024; US 6961127 B2 20051101

DOCDB simple family (application)

EP 02445049 A 20020418; AT 02445049 T 20020418; DE 60229036 T 20020418; SE 0101374 A 20010419; US 12559002 A 20020419