EP 1349704 B1 20040811 - POLISHING PLATEN WITH PRESSURIZED MEMBRANE
Title (en)
POLISHING PLATEN WITH PRESSURIZED MEMBRANE
Title (de)
POLIERSCHEIBE MIT DRUCKBEAUFSCHLAGTER MEMBRAN
Title (fr)
PLATINE DE POLISSAGE A MEMBRANE PRESSURISEE
Publication
Application
Priority
- US 0150625 W 20011221
- US 74784400 A 20001221
- US 74774500 A 20001222
Abstract (en)
[origin: US2002081945A1] An invention is disclosed for improved performance in a CMP process using piezoelectric elements as a replacement for a platen air bearing. In one embodiment, a platen for improving performance in CMP applications is disclosed. The platen includes a plurality of piezoelectric elements disposed above the platen. In operation, the piezoelectric elements are used to exert force on the polishing belt during a CMP process. In this manner, zonal control is provided during the CMP process.
IPC 1-7
IPC 8 full level
B24B 21/04 (2006.01); B24B 37/12 (2012.01); B24B 49/16 (2006.01); B24D 9/08 (2006.01)
CPC (source: EP US)
B24B 21/04 (2013.01 - EP US); B24B 37/12 (2013.01 - EP US); B24B 49/16 (2013.01 - EP US); B24D 9/08 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IE IT NL
DOCDB simple family (publication)
US 2002081945 A1 20020627; AU 3288902 A 20020701; CN 1209228 C 20050706; CN 1481295 A 20040310; EP 1349704 A1 20031008; EP 1349704 B1 20040811
DOCDB simple family (application)
US 74784400 A 20001221; AU 3288902 A 20011221; CN 01821071 A 20011221; EP 01992420 A 20011221