EP 1354138 B1 20080910 - TURBOMOLECULAR VACUUM PUMP WITH ROTOR AND STATOR VANES
Title (en)
TURBOMOLECULAR VACUUM PUMP WITH ROTOR AND STATOR VANES
Title (de)
TURBOMOLEKULARVAKUUMPUMPE MIT ROTOR- UND STATORSCHAUFELN
Title (fr)
POMPE A VIDE TURBOMOLECULAIRE COMPRENANT DES AILETTES DE ROTOR ET DES AILETTES DE STATOR
Publication
Application
Priority
- DE 10103230 A 20010125
- EP 0113204 W 20011115
Abstract (en)
[origin: DE10103230A1] Turbomolecular vacuum pump (1) with an inlet (3) and an outlet (4) and rotor and stator vanes (5 and 6), situated between the inlet and outlet, whereby the rotor blades (6) have front sides (11) and rear sides (12) in relation to the direction of rotation thereof. According to the invention, the pumping properties of the pump my be improved, whereby at least a part of the rotor vanes (6) comprises a rear side (12), convex on the suction-side and concave on the pressure side, or that at least part of the rotor vane (6) comprises a front side (11), which is concave on the suction side and convex on the pressure side.
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/32 (2006.01); F04D 29/38 (2006.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US); F04D 29/324 (2013.01 - EP US); F05D 2250/70 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB IT LI
DOCDB simple family (publication)
DE 10103230 A1 20020801; DE 50114317 D1 20081023; EP 1354138 A1 20031022; EP 1354138 B1 20080910; JP 2004536989 A 20041209; JP 3974529 B2 20070912; US 2004037695 A1 20040226; US 6910861 B2 20050628; WO 02059483 A1 20020801
DOCDB simple family (application)
DE 10103230 A 20010125; DE 50114317 T 20011115; EP 0113204 W 20011115; EP 01994664 A 20011115; JP 2002559954 A 20011115; US 46634303 A 20030711