EP 1354180 A4 20050112 - TIME BASED MASS FLOW CONTROLLER AND METHOD FOR CONTROLLING FLOW RATE USING IT
Title (en)
TIME BASED MASS FLOW CONTROLLER AND METHOD FOR CONTROLLING FLOW RATE USING IT
Title (de)
MASSENFLUSSSTEUERUNG AUF ZEITBASIS UND VERFAHREN ZUR STRÖMUNGSGESCHWINDIGKEITSTEUERUNG DAMIT
Title (fr)
UNITE DE REGULATION DE DEBIT TEMPORELLE ET PROCEDE DE REGULATION DE DEBIT L'UTILISANT
Publication
Application
Priority
- KR 0102016 W 20011122
- KR 20000084326 A 20001228
- KR 20010041670 A 20010711
- KR 20010052398 A 20010829
- US 11269202 A 20020329
Abstract (en)
[origin: WO02054020A1] A time based mass flow controller controls the volume flow and mass flow accurately based on time. The time based mass flow controller includes at least one reservoir 1, at least one inlet valve 13, each inlet valve 13 opening/closing an inlet of a corresponding reservoir 1, at least one outlet valve 3, each outlet valve 3 opening/closing an outlet of a corresponding reservoir 1, and a controller for controlling the number of opening/closing loops of the inlet valve 13 and the outlet valve 3 per unit time and/or mass/volume of gas stored and discharged at the reservoir 1 per unit opening/closing loop of the inlet valve 13 and the outlet valve3 , with the inlet valve 13 opening the inlet of the reservoir 1 to allow the gas to flow into the reservoir 1 when the outlet valve 3 is in a closed state, and thereafter the outlet valve 3 opening the outlet of the reservoir 1 to allow the gas to flow out from the reservoir 1 when the inlet valve 13 is in a closed state, so that the controller may control the mass/volume flow rate of the outflow gas from the reservoir 1.
IPC 1-7
IPC 8 full level
G05D 7/06 (2006.01)
CPC (source: EP)
G05D 7/0647 (2013.01)
Citation (search report)
- [XY] US 4364413 A 19821221 - BERSIN RICHARD L, et al
- [Y] EP 0660091 A1 19950628 - SEVA [FR], et al
- [A] US 5925829 A 19990720 - LARAGIONE ROBERT [US], et al
- [A] GB 1165432 A 19691001 - BALZERS PATENT UND BESEILIGUNG [LI]
- [A] US 4285245 A 19810825 - KENNEDY LYN R
- See references of WO 02054020A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 02054020 A1 20020711; EP 1354180 A1 20031022; EP 1354180 A4 20050112
DOCDB simple family (application)
KR 0102016 W 20011122; EP 01272934 A 20011122