EP 1358021 A4 20040331 - INVERTED PRESSURE VESSEL WITH SHIELDED CLOSURE MECHANISM
Title (en)
INVERTED PRESSURE VESSEL WITH SHIELDED CLOSURE MECHANISM
Title (de)
INVERTIERTER DRUCKBEHÄLTER MIT ABGESCHIRMTEM SCHLIESSMECHANISMUS
Title (fr)
CUVE A PRESSION INVERSEE POURVUE D'UN MECANISME DE FERMETURE PROTEGE
Publication
Application
Priority
- US 0103796 W 20010205
- US 63277000 A 20000804
Abstract (en)
[origin: WO0211911A1] An inverted pressure vessel (10) system for conducting automated industrial processes requiring elevated pressure and temperatures has a vertically movable pedestal (50) for opening and closing the underside loading port, with pedestal drive system (52) and locking mechanism (90) located below the pedestal (80) top and isolated from the chamber (10) opening. The chamber (10) is connectible to a pressure control and process fluid supply system (30), and has heat exchangers connected to an external source for temperature control. Process fluids are distributed across a central process cavity (8) through divergent inflow and convergent outflow process fluid channels (6, 7).
IPC 1-7
IPC 8 full level
B01J 3/00 (2006.01); B01J 3/02 (2006.01); B01J 3/04 (2006.01); H01L 21/304 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01)
CPC (source: EP KR)
B01J 3/008 (2013.01 - EP); H01L 21/00 (2013.01 - KR); H01L 21/67751 (2013.01 - EP)
Citation (search report)
- [Y] US 5621982 A 19970422 - YAMASHITA TEPPEI [JP], et al
- [Y] EP 0623948 A1 19941109 - ASM JAPAN [JP]
- [Y] US 5979306 A 19991109 - FUJIKAWA TAKAO [JP], et al
- [Y] US 6067728 A 20000530 - FARMER ROBERT B [US], et al
- [E] WO 0122016 A1 20010329 - S C FLUIDS INC [US]
- [E] WO 0110733 A1 20010215 - S C FLUIDS INC [US]
- [E] WO 0187505 A1 20011122 - S C FLUIDS INC [US]
- See references of WO 0211911A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0211911 A1 20020214; AU 3485601 A 20020218; CN 1446127 A 20031001; EP 1358021 A1 20031105; EP 1358021 A4 20040331; IL 154095 A0 20030731; JP 2004506313 A 20040226; KR 20030026333 A 20030331
DOCDB simple family (application)
US 0103796 W 20010205; AU 3485601 A 20010205; CN 01813784 A 20010205; EP 01907022 A 20010205; IL 15409501 A 20010205; JP 2002517234 A 20010205; KR 20037001535 A 20030203