EP 1361469 B1 20061018 - Optical switch
Title (en)
Optical switch
Title (de)
Optischer Schalter
Title (fr)
Commutateur optique
Publication
Application
Priority
JP 2002135574 A 20020510
Abstract (en)
[origin: EP1361469A1] There is provided an optical switch configured such that the electrode-to-electrode distance can be easily set to a desired distance and a plurality of protrusions or an electrode pattern for preventing the sticking from occurring can easily be formed on the surface of a fixed electrode substrate on which a fixed electrode is formed. There is prepared an upper substrate comprising an insulation layer, a thick single crystal silicon layer formed on the top surface of the insulation layer, and a thin single crystal silicon layer formed on the bottom surface of the insulation layer. A movable plate-like electrode and a plurality of flexible beam-like members for supporting the movable plate-like electrode to be displaced vertically are formed in the thin single crystal silicon layer. By applying an etching to the thick single crystal silicon layer, a plurality of the optical fiber securing grooves are formed as well as a plurality of micro-mirrors erecting from the movable plate-like electrode are formed on the thick single crystal silicon layer. The upper substrate is mounted on a lower substrate comprising a fixed electrode substrate and a fixed electrode formed on the top surface thereof, through a spacer interposed therebetween, thereby to juxtapose the fixed electrode and the thin single crystal silicon layer substantially in parallel with each other and in opposed manner with a predetermined gap therebetween. <IMAGE>
IPC 8 full level
G02B 26/08 (2006.01); B81B 3/00 (2006.01); G02B 5/08 (2006.01); G02B 6/35 (2006.01); G02B 6/36 (2006.01)
CPC (source: EP KR US)
B81B 3/001 (2013.01 - EP US); G02B 6/357 (2013.01 - EP US); G02B 6/3636 (2013.01 - EP US); G02B 26/08 (2013.01 - KR); G02B 6/3514 (2013.01 - EP US); G02B 6/3518 (2013.01 - EP US); G02B 6/3546 (2013.01 - EP US); G02B 6/3584 (2013.01 - EP US); G02B 6/3692 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1361469 A1 20031112; EP 1361469 B1 20061018; AT E343149 T1 20061115; CN 1210597 C 20050713; CN 1456912 A 20031119; DE 60309097 D1 20061130; DE 60309097 T2 20070308; JP 2003329946 A 20031119; JP 3639978 B2 20050420; KR 100485421 B1 20050427; KR 20030087970 A 20031115; US 2003210853 A1 20031113; US 6999650 B2 20060214
DOCDB simple family (application)
EP 03010479 A 20030509; AT 03010479 T 20030509; CN 03142991 A 20030510; DE 60309097 T 20030509; JP 2002135574 A 20020510; KR 20030029304 A 20030509; US 43506303 A 20030509