EP 1366220 A1 20031203 - METHOD FOR ETCHING LAYERS DEPOSITED ON TRANSPARENT SUBSTRATES SUCH AS A GLASS SUBSTRATE
Title (en)
METHOD FOR ETCHING LAYERS DEPOSITED ON TRANSPARENT SUBSTRATES SUCH AS A GLASS SUBSTRATE
Title (de)
VERFAHREN ZUM ÄTZEN VON SCHICHTEN AUF TRANSPARENTEN SUBSTRATEN DES TYPS GLASSUBSTRAT
Title (fr)
PROCEDE DE GRAVURE DE COUCHES DEPOSEES SUR DES SUBSTRATS TRANSPARENTS DU TYPE SUBSTRAT VERRIER
Publication
Application
Priority
- FR 0200706 W 20020227
- FR 0103092 A 20010307
Abstract (en)
[origin: WO02070792A1] The invention concerns a method for electrochemical etching of a layer (11) with electrically conductive properties, of doped metal oxide type, on a glass-type transparent substrate (10) provided with a mask to be removed after etching, and the method which consists in: contacting at least a zone of the layer to be etched (13) with an electrically conductive solution (20), immersing in the solution (20) an electrode (30) and arranging it opposite and at a distance ( d ) from the zone (13), applying an electric voltage (U) between the electrode (30) and the layer (11) to be etched. The invention is characterised in that the electrode has an elongated shape such that the etching is carried out on several zones of the layer over a width ( l ) of the substrate.
IPC 1-7
IPC 8 full level
C25F 3/00 (2006.01); C25F 3/02 (2006.01); C25F 3/14 (2006.01); H01J 9/02 (2006.01); H01J 11/02 (2006.01)
CPC (source: EP KR US)
C25F 3/14 (2013.01 - EP US); H01J 9/02 (2013.01 - EP US); H01L 21/3063 (2013.01 - KR); H01J 2217/49207 (2013.01 - EP US)
Citation (search report)
See references of WO 02070792A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02070792 A1 20020912; CA 2437886 A1 20020912; CN 1279219 C 20061011; CN 1500158 A 20040526; CZ 20032409 A3 20040218; EP 1366220 A1 20031203; FR 2821862 A1 20020913; FR 2821862 B1 20031114; JP 2004531641 A 20041014; KR 100888244 B1 20090311; KR 20030087631 A 20031114; PL 369225 A1 20050418; RU 2003129657 A 20050210; RU 2285067 C2 20061010; US 2004140227 A1 20040722; US 7507324 B2 20090324
DOCDB simple family (application)
FR 0200706 W 20020227; CA 2437886 A 20020227; CN 02806039 A 20020227; CZ 20032409 A 20020227; EP 02708421 A 20020227; FR 0103092 A 20010307; JP 2002569493 A 20020227; KR 20037011490 A 20030901; PL 36922502 A 20020227; RU 2003129657 A 20020227; US 46983004 A 20040212