EP 1366647 A1 20031203 - APPARATUS FOR GENERATING LOW TEMPERATURE PLASMA AT ATMOSPHERIC PRESSURE
Title (en)
APPARATUS FOR GENERATING LOW TEMPERATURE PLASMA AT ATMOSPHERIC PRESSURE
Title (de)
VORRICHTUNG ZUM ERZEUGEN VON NIEDERTEMPERATURPLASMA BEI ATMOSPHÄRENDRUCK
Title (fr)
APPAREIL DE PRODUCTION DE PLASMA A BASSE TEMPERATURE ET A PRESSION ATMOSPHERIQUE
Publication
Application
Priority
- KR 0200202 W 20020208
- KR 20010006653 A 20010212
Abstract (en)
[origin: WO02065820A1] Disclosed is an apparatus for generating low-temperature plasma at atmospheric pressure, comprising: a couple of electrodes facing each other at a distance, one of them being connected to a power supply, the other being grounded; a couple of dielectrics with a thickness of 25 mu m-10 mm, positioned on the facing surfaces of the electrodes in such a way as to face each other, one of them having at least one discharge gap therein; and a conductor electrode having at least one tip positioned within the discharge gap, wherein an electric field is applied at an intensity of 1-100 KV/cm through the power supply across the electrodes by use of a pulse direct current or an alternating current in a frequency bandwidth of 50 Hz-10 GHz while a reaction gas is fed between the electrodes, so as to induce a hollow cathode discharge, a capillary discharge or the high accumulation of charges from the discharge gap. The inventive apparatus prevents the conversion of the plasma to arcs and thus gives stable, low-temperature plasma in a high density.
IPC 1-7
IPC 8 full level
H05H 1/24 (2006.01); B01J 19/08 (2006.01); C23C 16/503 (2006.01); H01J 37/32 (2006.01); H05H 1/48 (2006.01)
CPC (source: EP KR)
H01J 37/32009 (2013.01 - EP); H01J 37/32018 (2013.01 - EP); H01J 37/32036 (2013.01 - EP); H05H 1/2406 (2013.01 - KR); H05H 1/48 (2013.01 - KR); H05H 2245/17 (2021.05 - KR); H05H 2245/36 (2021.05 - KR)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02065820 A1 20020822; CN 1228999 C 20051123; CN 1491527 A 20040421; EP 1366647 A1 20031203; EP 1366647 A4 20070808; JP 2004527073 A 20040902; JP 3990285 B2 20071010; KR 100464902 B1 20050105; KR 20020066467 A 20020819; TW I244879 B 20051201
DOCDB simple family (application)
KR 0200202 W 20020208; CN 02804879 A 20020208; EP 02700834 A 20020208; JP 2002565398 A 20020208; KR 20010006653 A 20010212; TW 91102638 A 20020208