EP 1368823 A2 20031210 - METHOD OF MANUFACTURING OPTICAL DEVICES AND RELATED IMPROVEMENTS
Title (en)
METHOD OF MANUFACTURING OPTICAL DEVICES AND RELATED IMPROVEMENTS
Title (de)
HERSTELLUNGSVERFAHREN FÜR OPTISCHE VORRICHTUNGEN UND VERBESSERUNGEN
Title (fr)
PROCEDE DE FABRICATION DE DISPOSITIFS OPTIQUES ET AMELIORATIONS A CET EFFET
Publication
Application
Priority
- GB 0200292 W 20020123
- GB 0101635 A 20010123
Abstract (en)
[origin: WO02059952A2] There is disclosed a method of manufacturing of optical devices, for example, semiconductor optoelectronic devices such as laser diodes, optical modulators, optical amplifiers, optical switches, and the like. There is further disclosed Optoelectronic Integrated Circuits (OEICs) and Photonic Integrated Circuits (PICs) including such devices. According to the present invention there is provided a method of manufacturing an optical device (40), a device body portion (15) from which the device (40) is to be made including a Quantum Well Intermixing (QWI) structure (30), the method including the step of plasma etching at least part of a surface of the device body portion (5) prior to depositing a dielectric layer (51) thereon so as to introduce structural defects at least into a portion (53) of the device body portion (5) adjacent the dielectric layer (51). The structural defects substantially comprise "point" defects.
IPC 1-7
IPC 8 full level
H01S 5/343 (2006.01); H01L 25/00 (2006.01); H01S 5/026 (2006.01); H01S 5/34 (2006.01)
CPC (source: EP US)
B82Y 20/00 (2013.01 - EP US); H01S 5/026 (2013.01 - EP US); H01S 5/0265 (2013.01 - EP US); H01S 5/3413 (2013.01 - EP US); H01S 5/3414 (2013.01 - EP US)
Citation (search report)
See references of WO 02059952A2
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02059952 A2 20020801; WO 02059952 A3 20031016; AT E304221 T1 20050915; AU 2002225206 A1 20020806; CA 2434088 A1 20020801; CN 1260775 C 20060621; CN 1488163 A 20040407; DE 60206025 D1 20051013; DE 60206025 T2 20060713; EP 1368823 A2 20031210; EP 1368823 B1 20050907; GB 0101635 D0 20010307; GB 2372148 A 20020814; JP 2004523897 A 20040805; JP 4260480 B2 20090430; RU 2003125850 A 20050220; US 2004106224 A1 20040603; US 6989286 B2 20060124
DOCDB simple family (application)
GB 0200292 W 20020123; AT 02715559 T 20020123; AU 2002225206 A 20020123; CA 2434088 A 20020123; CN 02804022 A 20020123; DE 60206025 T 20020123; EP 02715559 A 20020123; GB 0101635 A 20010123; JP 2002560184 A 20020123; RU 2003125850 A 20020123; US 46697203 A 20031212