EP 1369745 A1 20031210 - Lihographic apparatus and device manufaturing method
Title (en)
Lihographic apparatus and device manufaturing method
Title (de)
Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
Title (fr)
Appareil lithographique et méthode de fabrication d'un dispositif
Publication
Application
Priority
- EP 03253564 A 20030605
- EP 02253970 A 20020607
Abstract (en)
A lithographic projection apparatus in which a reaction force is generated between a balance mass BM and a substrate table WT. The balance mass BM is elastically coupled to the base frame BF with a suspension eigenfrequency of between 0.3 and 10 Hz. <IMAGE>
IPC 1-7
IPC 8 full level
B23Q 1/58 (2006.01); B23Q 11/00 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP)
B23Q 1/58 (2013.01); B23Q 11/0032 (2013.01); G03F 7/70725 (2013.01); G03F 7/70758 (2013.01); G03F 7/70766 (2013.01); G03F 7/70833 (2013.01); G03F 7/709 (2013.01)
Citation (applicant)
- US 6262796 B1 20010717 - LOOPSTRA ERIK R [NL], et al
- US 2002012108 A1 20020131 - HARA HIROMICHI [JP]
- EP 0917004 A2 19990519 - CANON KK [JP]
- US 2001006762 A1 20010705 - KWAN YIM BUN P [NL], et al
- EP 1111470 A2 20010627 - ASM LITHOGRAPHY BV [NL]
Citation (search report)
- [XY] US 2002012108 A1 20020131 - HARA HIROMICHI [JP]
- [Y] US 2001006762 A1 20010705 - KWAN YIM BUN P [NL], et al
- [Y] EP 1111470 A2 20010627 - ASM LITHOGRAPHY BV [NL]
- [A] US 5844666 A 19981201 - VAN ENGELEN GERARD [NL], et al
- [A] US 5815246 A 19980929 - SPERLING FRANK B [NL], et al
- [A] US 6262796 B1 20010717 - LOOPSTRA ERIK R [NL], et al
- [A] US 5953105 A 19990914 - VAN ENGELEN GERARD [NL], et al
- [A] EP 0502578 A1 19920909 - PHILIPS NV [NL]
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
DOCDB simple family (application)
EP 03253564 A 20030605