EP 1373331 A4 20070117 - THERMALLY CURED UNDERLAYER FOR LITHOGRAPHIC APPLICATION
Title (en)
THERMALLY CURED UNDERLAYER FOR LITHOGRAPHIC APPLICATION
Title (de)
THERMISCH GEHÄRTETE UNTERSCHICHT FÜR DIE LITHOGRAPHIE
Title (fr)
SOUS-COUCHE DURCIE THERMIQUEMENT POUR APPLICATION LITHOGRAPHIQUE
Publication
Application
Priority
- US 0207136 W 20020307
- US 27552801 P 20010313
Abstract (en)
[origin: WO02073307A2] Thermally cured undercoat for use in lithography of a thermally cured composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator, wherein the hydroxyl containing polymer is a polymer comprising units m, n and o of the formula (I) wherein R<1> is H or methyl; R<2> is a substituted or unsubstituted C6-C14 aryl acrylate or C6-C14 aryl methacrylate group wherein the substituted groups may be phenyl, Cl-4 alkyl or C1-4 alkoxy; R<3> is a hydroxyl functionalized Cl-C8 alkyl acrylate, methacrylate or C6-C14 aryl group, R<4> is a C1-C10 linear or branched alkylene; p is an integer of from 1 to 5 with the proviso that there are no more than thirty carbon atoms in the [-R<4>O-]p ; R<5> is a Cl-C10 linear, branched or cyclic alkyl, substituted or unsubstituted C6-Cl4 aryl, or substituted or unsubstituted C7-Cl5 alicyclic hydrocarbon; and m is about 40 to 70, n is about 15 to 35 and o is about 15 to 25.
IPC 8 full level
C08F 220/10 (2006.01); G03F 7/09 (2006.01); G03F 7/11 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR)
C08F 212/32 (2013.01 - KR); G03F 7/091 (2013.01 - EP); G03F 7/094 (2013.01 - EP)
Citation (search report)
- [X] WO 0054105 A1 20000914 - ARCH SPEC CHEM INC [US]
- [Y] JP H0539399 A 19930219 - NOK CORP
- [A] EP 0292215 A2 19881123 - HITACHI CHEMICAL CO LTD [JP]
- [A] EP 0813114 A2 19971217 - SHIPLEY CO LLC [US]
- [E] EP 1211271 A1 20020605 - NIPPON SODA CO [JP]
- [Y] DATABASE WPI Week 199320, Derwent World Patents Index; AN 1993-162141, XP002410588
- See references of WO 02073307A2
Citation (examination)
- EP 0987600 A1 20000322 - SHIPLEY CO LLC [US]
- EP 0942331 A1 19990915 - CLARIANT INT LTD [CH]
- EP 1211271 A1 20020605 - NIPPON SODA CO [JP]
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02073307 A2 20020919; WO 02073307 A3 20021121; EP 1373331 A2 20040102; EP 1373331 A4 20070117; JP 2004534107 A 20041111; KR 100709330 B1 20070420; KR 20040024853 A 20040322; TW 574234 B 20040201
DOCDB simple family (application)
US 0207136 W 20020307; EP 02733834 A 20020307; JP 2002572501 A 20020307; KR 20037011930 A 20030909; TW 91104609 A 20020312