EP 1373604 A1 20040102 - TANK FOR EPITAXY INSTALLATION AND INSTALLATION COMPRISING ONE SUCH TANK
Title (en)
TANK FOR EPITAXY INSTALLATION AND INSTALLATION COMPRISING ONE SUCH TANK
Title (de)
BEHÄLTER FÜR EINE EPITAXIE-ANLAGE UND ANLAGE MIT SOLCHEM BEHÄLTER
Title (fr)
RESERVOIR POUR INSTALLATION D'EPITAXIE ET INSTALLATION COMPRENANT UN TEL RESERVOIR
Publication
Application
Priority
- FR 0201180 W 20020404
- FR 0104581 A 20010404
Abstract (en)
[origin: WO02081787A1] The invention relates to a tank (1) for producing arsenic vapour [in particular intended for epitaxy equipment] comprising a crucible which is placed inside an external housing (12) that is intended to contain leakage. The space between the crucible and the external housing (12) is subjected to a pressure lower than atmospheric pressure. Said crucible is fitted with an outlet duct and a loading flange (14) and is characterised in that the outlet duct and the loading flange (14) are disposed in the upper part of the crucible.
IPC 1-7
IPC 8 full level
C23C 14/24 (2006.01); C30B 23/06 (2006.01)
CPC (source: EP US)
C23C 14/243 (2013.01 - EP US); C30B 23/066 (2013.01 - EP US)
Citation (search report)
See references of WO 02081787A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02081787 A1 20021017; EP 1373604 A1 20040102; FR 2823228 A1 20021011; FR 2823228 B1 20030613; US 2004105796 A1 20040603
DOCDB simple family (application)
FR 0201180 W 20020404; EP 02730343 A 20020404; FR 0104581 A 20010404; US 67832103 A 20031003