EP 1373996 A2 20040102 - MANUFACTURING SYSTEM AND METHOD FOR PROCESSING MATERIALS
Title (en)
MANUFACTURING SYSTEM AND METHOD FOR PROCESSING MATERIALS
Title (de)
HERSTELLUNGSVORRICHTUNG UND VERFAHREN ZUM VERARBEITEN VON MATERIALIEN
Title (fr)
SYSTEME ET PROCEDE DE FABRICATION PERMETTANT DE TRAITER DES MATERIAUX
Publication
Application
Priority
- EP 0113407 W 20011119
- US 71789600 A 20001120
Abstract (en)
[origin: WO02071167A2] A manufacturing system comprises materials (110, 120) to be processed, and processing tools (130, 140, 150) for processing said materials (110, 120). To each of said materials (110, 120) there are assigned means (111, 121) for directly exchanging information with said processing tools (130, 140, 150) and for deciding on the basis of said directly exchanged inormation which of said processing tools (130, 140, 150) is supposed to process a respective material (110, 120).
IPC 1-7
IPC 8 full level
G05B 19/418 (2006.01); G05B 19/12 (2006.01); H01L 21/02 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01)
CPC (source: EP)
G05B 19/128 (2013.01); G05B 2219/25186 (2013.01); G05B 2219/31161 (2013.01); G05B 2219/31322 (2013.01); Y02P 90/02 (2015.11)
Citation (search report)
See references of WO 02071167A2
Designated contracting state (EPC)
DE FR GB IE IT
DOCDB simple family (publication)
WO 02071167 A2 20020912; WO 02071167 A3 20031009; CN 1478221 A 20040225; EP 1373996 A2 20040102; JP 2004519055 A 20040624; TW 561324 B 20031111
DOCDB simple family (application)
EP 0113407 W 20011119; CN 01819247 A 20011119; EP 01983588 A 20011119; JP 2002570024 A 20011119; TW 90128738 A 20011120