EP 1374277 B1 20070613 - INDUCTIVE PLASMA PROCESSOR INCLUDING CURRENT SENSOR FOR PLASMA EXCITATION COIL
Title (en)
INDUCTIVE PLASMA PROCESSOR INCLUDING CURRENT SENSOR FOR PLASMA EXCITATION COIL
Title (de)
INDUKTIVPLASMA-BEHANDLUNGSVORRICHTUNG MIT EINEM STROMSENSOR FÜR PLASMAERREGERSPULE
Title (fr)
PROCESSEUR A PLASMA INDUCTIF COMPORTANT UN CAPTEUR DE COURANT POUR BOBINE D'EXCITATION DE PLASMA
Publication
Application
Priority
- US 0209564 W 20020329
- US 82070901 A 20010330
Abstract (en)
[origin: WO02080220A1] An inductive plasma processor includes an RF plasma excitation coil having plural windings, each having a first end connected in parallel to be driven by a single RF source via a single matching network. Second ends of the windings are connected to ground by termination capacitors, in turn connected by a lead to ground. A current sensor including a winding around a toroidal core is coupled to the lead between each termination capacitor and ground. The current sensor is surrounded by a grounded shield. There is minimum electromagnetic interference from an ambient RF environment to the current sensor, to provide an accurate current sensor.
IPC 8 full level
H01J 37/32 (2006.01); H05H 1/46 (2006.01); H01L 21/205 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP KR US)
H01J 37/32 (2013.01 - KR); H01J 37/321 (2013.01 - EP US); H01J 37/32174 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02080220 A1 20021010; AT E364896 T1 20070715; CN 1287414 C 20061129; CN 1511335 A 20040707; DE 60220652 D1 20070726; DE 60220652 T2 20071025; EP 1374277 A1 20040102; EP 1374277 B1 20070613; JP 2004533090 A 20041028; KR 100863470 B1 20081016; KR 20040018344 A 20040303; TW I255671 B 20060521; US 2002179250 A1 20021205; US 6583572 B2 20030624
DOCDB simple family (application)
US 0209564 W 20020329; AT 02719377 T 20020329; CN 02810531 A 20020329; DE 60220652 T 20020329; EP 02719377 A 20020329; JP 2002578537 A 20020329; KR 20037012842 A 20030930; TW 91106376 A 20020329; US 82070901 A 20010330