EP 1376088 A2 20040102 - Method for making a thin film resonant microbeam absolute pressure sensor
Title (en)
Method for making a thin film resonant microbeam absolute pressure sensor
Title (de)
Herstellungsverfahren eines sensors für den absoluten Druck mit einem resonant schwingenden Dünnfilm-Mikrobalken
Title (fr)
Procédé de fabrication d'un capteur de préssion absolue avec micro-fasceau à couche mince résonnant
Publication
Application
Priority
- EP 97954284 A 19971229
- US 77837596 A 19961231
Abstract (en)
A micromechanical sensor having a polysilicon beam that is an integral part of the diaphragm resulting in a frequency of the beam that is a direct result of the pressure applied to the external surface of the diaphragm. Fabrication of this resonant microbeam sensor has no backside wafer processing, and involves a process and layout independent of wafer thickness for high yield and robustness. Both the diaphragm and resonant beam are formed from polysilicon. The sensor may have more that one resonant beam. The sensor beam or beams may be driven and sensed by electrical or optical mechanisms. For stress isolation, the sensor may be situated on a cantilevered single crystal silicon paddle. The sensor may be recessed on the isolating die for non-interfering interfacing with optical or electrical devices.
IPC 1-7
IPC 8 full level
G01L 1/16 (2006.01); G01L 9/00 (2006.01); H01L 29/84 (2006.01)
CPC (source: EP US)
G01L 9/0019 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
US 5747705 A 19980505; CA 2272104 A1 19980709; CA 2272104 C 20081118; DE 69726009 D1 20031211; DE 69726009 T2 20040909; EP 0950173 A1 19991020; EP 0950173 B1 20031105; EP 1376088 A2 20040102; EP 1376088 A3 20060118; EP 1376089 A2 20040102; EP 1376089 A3 20060118; JP 2001507801 A 20010612; WO 9829722 A1 19980709
DOCDB simple family (application)
US 77837596 A 19961231; CA 2272104 A 19971229; DE 69726009 T 19971229; EP 03077647 A 19971229; EP 03077663 A 19971229; EP 97954284 A 19971229; JP 53028898 A 19971229; US 9724108 W 19971229