EP 1377752 A2 20040107 - TURBOMOLECULAR PUMP
Title (en)
TURBOMOLECULAR PUMP
Title (de)
TURBOMOLEKULARPUMPE
Title (fr)
POMPE TURBOMOLECULAIRE
Publication
Application
Priority
- DE 10114969 A 20010327
- EP 0202884 W 20020315
Abstract (en)
[origin: WO02077462A2] A turbomolecular pump (10) comprises a stator, a pump rotor, a motor (28) for driving the pump rotor and a control device (42). The control device (42) controls the motor output as to prevent the motor output from exceeding a permissible motor maximum output. Stator-side temperature sensors (32-38), which are provided for measuring the stator temperature, are arranged on the turbomolecular pump (10). The control device (42) comprises a maximum output determining device (50), that establishes the permissible motor maximum output according to the measured stator temperature. The permissible motor maximum output is thus not set to a constant value, but is always determined according to the stator temperature. This results in the power of the motor being fully exploited as long as the measured stator temperature is less than a maximum value.
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 27/00 (2006.01); F04D 29/00 (2006.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US); F04D 19/046 (2013.01 - US); F04D 27/00 (2013.01 - EP US); F04D 27/001 (2013.01 - EP); F05D 2270/335 (2013.01 - EP)
Citation (search report)
See references of WO 02077462A2
Designated contracting state (EPC)
CH DE FR GB IT LI
DOCDB simple family (publication)
WO 02077462 A2 20021003; WO 02077462 A3 20021212; AU 2002257665 A1 20021008; CA 2441957 A1 20021003; CA 2441957 C 20100803; DE 10114969 A1 20021010; EP 1377752 A2 20040107; EP 1377752 B1 20110511; JP 2004522040 A 20040722; JP 4511117 B2 20100728; US 2004081560 A1 20040429; US 7090469 B2 20060815
DOCDB simple family (application)
EP 0202884 W 20020315; AU 2002257665 A 20020315; CA 2441957 A 20020315; DE 10114969 A 20010327; EP 02727419 A 20020315; JP 2002575481 A 20020315; US 47323703 A 20030925