EP 1379340 A1 20040114 - LAYERED STACKS AND METHODS OF PRODUCTION THEREOF
Title (en)
LAYERED STACKS AND METHODS OF PRODUCTION THEREOF
Title (de)
GESCHICHTETE STAPEL UND VERFAHREN ZU IHRER HERSTELLUNG
Title (fr)
EMPILEMENTS STRATIFIES ET PROCEDES DE PRODUCTION CORRESPONDANTS
Publication
Application
Priority
- US 0211927 W 20020416
- US 28427101 P 20010416
- US 29486401 P 20010530
Abstract (en)
[origin: WO02083327A1] Low dielectric constant layered materials and a methof for making said layered materials comprising the steps of: a) providing a surface ; b) spinning a dielectric material on to the surface; c) curing the dielectric material to form a dielectric layer; d) spinning a low dielectric constant material on to the dielectric layer; and e) curing the low dielectric constant material to form a low dielectric constant layer. Each layer can be spun-on to the layered component and subsequently cured before additional layers are added or all layers can be spun-on to the layered component and then the entire stack is cured at once.
IPC 1-7
IPC 8 full level
B05D 1/40 (2006.01); B05D 7/00 (2006.01); H01L 21/312 (2006.01); H01L 21/316 (2006.01); H01L 21/768 (2006.01); H05K 1/03 (2006.01)
CPC (source: EP KR)
B32B 9/04 (2013.01 - KR); H01L 21/02126 (2013.01 - EP); H01L 21/02203 (2013.01 - EP); H01L 21/02216 (2013.01 - EP); H01L 21/02282 (2013.01 - EP); H01L 21/02304 (2013.01 - EP); H01L 21/02362 (2013.01 - EP); H01L 21/76807 (2013.01 - EP); H01L 21/76828 (2013.01 - EP); H05K 1/0313 (2013.01 - EP)
Citation (search report)
See references of WO 02083327A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02083327 A1 20021024; CA 2442030 A1 20021024; CN 1503704 A 20040609; EP 1379340 A1 20040114; JP 2004536691 A 20041209; KR 20040005920 A 20040116
DOCDB simple family (application)
US 0211927 W 20020416; CA 2442030 A 20020416; CN 02808248 A 20020416; EP 02728780 A 20020416; JP 2002581120 A 20020416; KR 20037013512 A 20031015