EP 1381901 A1 20040121 - INSPECTION MICROSCOPE FOR SEVERAL WAVELENGTH RANGES AND REFLECTION REDUCING LAYER FOR AN INSPECTION MICROSCOPE FOR SEVERAL WAVELENGTH RANGES
Title (en)
INSPECTION MICROSCOPE FOR SEVERAL WAVELENGTH RANGES AND REFLECTION REDUCING LAYER FOR AN INSPECTION MICROSCOPE FOR SEVERAL WAVELENGTH RANGES
Title (de)
INSPEKTIONSMIKROSKOP FÜR MEHRERE WELLENLÄNGENBEREICHE UND REFLEXIONSMINDERUNGSSCHICHT FÜR EIN INSPEKTIONSMIKROSKOP FÜR MEHRERE WELLENLÄNGENBEREICHE
Title (fr)
MICROSCOPE DE CONTROLE POUR PLUSIEURS GAMMES DE LONGUEURS D'ONDE ET COUCHE ANTIREFLET DESTINEE A UN MICROSCOPE DE CONTROLE POUR PLUSIEURS GAMMES DE LONGUEURS D'ONDE
Publication
Application
Priority
- DE 10119909 A 20010423
- EP 0203217 W 20020322
Abstract (en)
[origin: WO02086579A1] An inspection microscope for several wavelength ranges with at least one illuminating beam path and at least one imaging beam path is disclosed. Those optical elements in the illuminating beam path and in the imaging beam path, through which beams of all wavelengths pass, are provided with a reflection reducing layer, by means of which the wavelength ranges with reduced reflection are the visible VIS-wavelength range up to 650 nm, the i-lines at lambda =365 nm and the ultraviolet DUV- wavelength range from 240 nm to 270 nm. The reflection reducing layer is a sandwich structure, comprising various material combinations, such as for example, M2/MgF2 or M2/MgF2/SiO2 or M2/MgF2/Al2O3, where M2 is a mixed substance from the company Merck, comprising La2O3.3,3 Al2O3. The optical components with reduced reflectance preferably comprise quartz glass or CaF2.
IPC 1-7
IPC 8 full level
G02B 1/11 (2006.01); G02B 1/115 (2015.01); G02B 21/00 (2006.01); G02B 21/06 (2006.01); G02B 21/16 (2006.01)
CPC (source: EP US)
G02B 1/115 (2013.01 - EP US); G02B 21/0016 (2013.01 - EP US); G02B 21/06 (2013.01 - EP US); G02B 21/16 (2013.01 - EP US)
Citation (search report)
See references of WO 02086579A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02086579 A1 20021031; DE 10119909 A1 20021031; DE 10119909 B4 20050421; EP 1381901 A1 20040121; JP 2004524585 A 20040812; JP 4012467 B2 20071121; TW 579434 B 20040311; US 2004145803 A1 20040729; US 7274505 B2 20070925
DOCDB simple family (application)
EP 0203217 W 20020322; DE 10119909 A 20010423; EP 02706779 A 20020322; JP 2002584048 A 20020322; TW 91106133 A 20020328; US 47565303 A 20031023