Global Patent Index - EP 1382063 A1

EP 1382063 A1 20040121 - METHOD AND APPARATUS FOR THE PRODUCTION OF PROCESS GASES

Title (en)

METHOD AND APPARATUS FOR THE PRODUCTION OF PROCESS GASES

Title (de)

VERFAHREN UND VORRICHTUNG ZUM ERZEUGEN VON PROZESSGASEN

Title (fr)

PROCEDE ET DISPOSITIF PERMETTANT DE PRODUIRE UN GAZ DE TRAVAIL

Publication

EP 1382063 A1 20040121 (DE)

Application

EP 02764065 A 20020419

Priority

  • DE 10119741 A 20010423
  • EP 0204345 W 20020419

Abstract (en)

[origin: WO02086958A1] The aim of the invention is the simple and economical production of a hydrogen-rich process gas from water vapour and hydrogen, whereby the proportion of water vapour to hydrogen may be precisely controllable and reproducible. Said aim is achieved, with a method and device for the production of a process gas for the treatment of substrates, in particular semiconductor substrates, in which the oxygen for formation of a process gas, comprising water vapour and hydrogen, is burnt in a hydrogen-rich environment in a combustion chamber.

IPC 1-7

H01L 21/316

IPC 8 full level

H01L 21/31 (2006.01); F22B 1/00 (2006.01); H01L 21/316 (2006.01)

CPC (source: EP US)

F22B 1/003 (2013.01 - EP US); H01L 21/31658 (2013.01 - EP)

Citation (search report)

See references of WO 02086958A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

DOCDB simple family (publication)

WO 02086958 A1 20021031; DE 10119741 A1 20021024; DE 10119741 B4 20120119; EP 1382063 A1 20040121; JP 2004522302 A 20040722; JP 4276845 B2 20090610; KR 100700240 B1 20070326; KR 20030092091 A 20031203; TW 588419 B 20040521; US 2004137754 A1 20040715; US 7144826 B2 20061205

DOCDB simple family (application)

EP 0204345 W 20020419; DE 10119741 A 20010423; EP 02764065 A 20020419; JP 2002584378 A 20020419; KR 20037013762 A 20031021; TW 91106866 A 20020404; US 47613604 A 20040202