EP 1384612 A3 20060118 - Mechanical deformation amount sensor
Title (en)
Mechanical deformation amount sensor
Title (de)
Sensor für mechanische Verformungsmessverfahren
Title (fr)
Capteur de teneur de déformation mécanique
Publication
Application
Priority
JP 2002211654 A 20020719
Abstract (en)
[origin: EP1384612A2] A mechanical deformation amount sensor includes a sensor structure (1) which is formed by a semiconductor substrate or an insulating substrate and integrally includes a deformation portion (2) deformable, when a physical quantity to be detected is applied to the sensor structure (1), due to the physical quantity and a support portion (1a) for supporting the deformation portion (2), a carbon nanotube resistance element (61, 62) which is provided on the deformation portion (2) so as to be mechanically deformed in response to deformation of the deformation portion (2) and a wiring pattern (7) which is formed in a pattern on the sensor structure (1) so as to be connected to the carbon nanotube resistance element (61, 62). By applying a voltage to the carbon nanotube resistance element (61, 62) via the wiring pattern (7), a change of electrical conductivity of the carbon nanotube resistance element (61, 62) upon mechanical deformation of the carbon nanotube resistance element (61, 62) is fetched as an electrical signal.
IPC 8 full level
G01L 9/00 (2006.01); B60J 7/057 (2006.01); B81B 3/00 (2006.01); B82B 1/00 (2006.01); G01P 15/12 (2006.01); H01L 29/84 (2006.01)
CPC (source: EP US)
B81B 3/0021 (2013.01 - EP US); B81B 3/0086 (2013.01 - EP US); B82Y 30/00 (2013.01 - US); G01L 9/0055 (2013.01 - EP US); G01P 15/123 (2013.01 - EP US); B81B 2201/0235 (2013.01 - EP US); B81B 2201/0257 (2013.01 - EP US); B81B 2201/0264 (2013.01 - EP US); B81B 2203/0118 (2013.01 - EP US); B81B 2203/0127 (2013.01 - EP US); G01P 2015/0828 (2013.01 - EP US); Y10S 977/956 (2013.01 - EP US)
Citation (search report)
- [X] US 5725785 A 19980310 - ISHIDA TATSUYA [JP], et al
- [X] US 5659138 A 19970819 - IWATA HITOSHI [JP], et al
- [A] EP 1182784 A2 20020227 - INFINEON TECHNOLOGIES AG [DE]
- [A] US 6270685 B1 20010807 - ISHIO SEIICHIRO [JP], et al
- [A] US 5759870 A 19980602 - YUN WEIJIE [US], et al
- [DA] PATENT ABSTRACTS OF JAPAN vol. 1999, no. 14 22 December 1999 (1999-12-22) & US 6276214 B1 20010821 - KIMURA TOYOAKI [JP], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1384612 A2 20040128; EP 1384612 A3 20060118; EP 1384612 B1 20071107; CA 2430451 A1 20040119; CA 2430451 C 20070116; CN 1238686 C 20060125; CN 1469100 A 20040121; DE 60317273 D1 20071220; DE 60317273 T2 20080828; DE 60330609 D1 20100128; EP 1790963 A2 20070530; EP 1790963 A3 20070718; EP 1790963 B1 20091216; JP 2004053424 A 20040219; JP 3969228 B2 20070905; US 2004012062 A1 20040122; US 6848320 B2 20050201
DOCDB simple family (application)
EP 03012387 A 20030530; CA 2430451 A 20030529; CN 03138275 A 20030530; DE 60317273 T 20030530; DE 60330609 T 20030530; EP 07104218 A 20030530; JP 2002211654 A 20020719; US 44678903 A 20030529