EP 1386347 A4 20050525 - MICROELECTROMECHANICAL SYSTEM (MENS) DEVICE
Title (en)
MICROELECTROMECHANICAL SYSTEM (MENS) DEVICE
Title (de)
EINRICHTUNG FÜR EIN MIKROELEKTROMECHANISCHEN (MENS)-SYSTEMS
Title (fr)
DISPOSITIF A SYSTEME MICRO-ELECTROMECANIQUE (MEMS)
Publication
Application
Priority
- US 0204824 W 20020220
- US 78892801 A 20010220
- US 80481701 A 20010313
- US 80541001 A 20010313
- US 141201 A 20011025
Abstract (en)
[origin: WO02067293A2] A microelectromechanical system (NEMS) analog isolator may be created in which an actuator such as an electrostatic motor drives a beam against an opposing force set, for example, by another electrostatic motor. Motion of the beam may be sensor also attached to the beam. The beam itself is electrically isolated between the locations of the actuator and the sensor. The structure may be incorporated into integrated circuits to provide on-chip isolation. A microelectricalmechanical system (MEMS) digital isolator may be created in which an actuator such as an electrostatic motor drives a beam against a predefined force set, for example, by another electrostatic motor. When the threshold of the opposing force is overcome, motion of the beam may be sensed by a sensor also attached to the beam. The beam itself is electrically isolated between the locations of the actuator and the sensor. The structure may be incorporated into integrated circuits to provide on-chip isolation. In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion. Microelectricalmechanical systems (MEMS) manufactured on a microscopic scale using integrated circuit techniques may be used to measure a variety of parameters using electrical signals generated by the movement of small beams. Inertial noise may be cancelled by the duplication of the beam structure for sensing of the acceleration to be subtracted from a similar beam structure used to measure the parameter of interest.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); B81B 7/02 (2006.01); G01P 15/13 (2006.01); G01R 15/20 (2006.01); G01R 17/08 (2006.01); G01R 19/20 (2006.01); G05B 19/07 (2006.01); H01H 59/00 (2006.01); H03H 9/46 (2006.01)
CPC (source: EP)
H01G 5/14 (2013.01); H02N 1/002 (2013.01)
Citation (search report)
- [X] US 5739686 A 19980414 - NAUGHTON MICHAEL J [US], et al
- [X] DE 10011830 A1 20000914 - DENSO CORP [JP]
- [A] US 5959516 A 19990928 - CHANG MAU CHUNG F [US], et al
- See references of WO 02067293A2
Designated contracting state (EPC)
CH DE FR GB IT LI
DOCDB simple family (publication)
WO 02067293 A2 20020829; WO 02067293 A3 20031127; WO 02067293 A9 20040401; AU 2002255563 A1 20020904; EP 1386347 A2 20040204; EP 1386347 A4 20050525; JP 2005503267 A 20050203; JP 4464607 B2 20100519
DOCDB simple family (application)
US 0204824 W 20020220; AU 2002255563 A 20020220; EP 02724965 A 20020220; JP 2002566525 A 20020220