EP 1390561 A1 20040225 - METHOD AND DEVICE FOR DEPOSITING LAYERS
Title (en)
METHOD AND DEVICE FOR DEPOSITING LAYERS
Title (de)
VERFAHREN UND VORRICHTUNG ZUM ABSCHEIDEN VON SCHICHTEN
Title (fr)
PROCEDE ET DISPOSITIF DE DEPOSITION DE COUCHES
Publication
Application
Priority
- DE 10124609 A 20010517
- EP 0204407 W 20020422
Abstract (en)
[origin: WO02092876A1] The invention relates to a device comprising a process chamber (2) which is arranged in a reaction housing and which can be heated especially be supplying heat to a substrate holder (6, 7), comprising a gas inlet (3) for the admission of gaseous starting material, whereby the decomposition products thereof are deposited on a substrate maintained by a substrate holder to form a layer, also comprising at least one sensor acting upon the inside of the process chamber for determining layer properties, further comprising an electronic control unit for controlling the heating of the process chamber, mass controllers for controlling the flow of the starting materials and a pump for controlling the pressure of the process chamber, characterized in that the electronic control unit forms modified process parameters from deviation values obtained upon growth of the calibrating layer with the aid of stored calibrating parameters, thereby controlling the heating of the process chamber, the flow controllers and the pump upon growth of the active layer sequence.
IPC 1-7
IPC 8 full level
C23C 16/52 (2006.01); C30B 25/14 (2006.01); C30B 25/16 (2006.01)
CPC (source: EP US)
C23C 16/52 (2013.01 - EP US); C30B 25/14 (2013.01 - EP US); C30B 25/165 (2013.01 - EP US)
Citation (search report)
See references of WO 02092876A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02092876 A1 20021121; DE 10124609 A1 20021121; DE 10124609 B4 20121227; EP 1390561 A1 20040225; US 2004152219 A1 20040805; US 6964876 B2 20051115
DOCDB simple family (application)
EP 0204407 W 20020422; DE 10124609 A 20010517; EP 02730186 A 20020422; US 71528203 A 20031117