EP 1390783 A2 20040225 - LENS SYSTEM CONSISTING OF FLUORIDE CRYSTAL LENSES
Title (en)
LENS SYSTEM CONSISTING OF FLUORIDE CRYSTAL LENSES
Title (de)
OBJEKTIV MIT FLUORID-KRISTALL-LINSEN
Title (fr)
OBJECTIF COMPORTANT DES LENTILLES DE CRISTAL DE FLUORURE
Publication
Application
Priority
- DE 10123725 A 20010515
- DE 10123727 A 20010515
- DE 10125487 A 20010523
- DE 10127320 A 20010606
- DE 10210782 A 20020312
- EP 0205050 W 20020508
Abstract (en)
[origin: WO02093209A2] A lens system, especially a projection lens system for a microlithographic projection illumination system, comprising at least one fluoride crystal lens. The disruptive influence of birefringence is reduced by using a lens which is a lens (100) with a lens axis which is approximately perpendicular in relation to the crystal planes {100} or the equivalent crystal planes of the fluoride crystal. In lens systems consisting of at least two fluoride crystal lenses, it is useful to arrange the fluoride crystal lenses in such a way that they are twisted in relation to each other. The lens axes of the fluoride crystal lenses can thus point in crystal direction (111) or (110), in addition to direction (100). It is also possible to reduce the disruptive influence of birefringence by using groups with twisted (100) lenses and groups with other twisted lenses (111) or other twisted (110) lenses. The disruptive influence of birefringence can be reduced further by providing the optical element with a compensating coating.
IPC 1-7
IPC 8 full level
G02B 13/24 (2006.01); G02B 1/02 (2006.01); G02B 5/30 (2006.01); G02B 17/08 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR US)
G02B 1/02 (2013.01 - EP US); G02B 1/08 (2013.01 - EP US); G02B 3/00 (2013.01 - KR); G02B 5/3083 (2013.01 - EP US); G03F 7/70225 (2013.01 - EP US); G03F 7/70241 (2013.01 - EP US); G03F 7/70566 (2013.01 - EP US); G03F 7/70958 (2013.01 - EP US); G03F 7/70966 (2013.01 - EP US); Y10S 359/90 (2013.01 - EP US)
Citation (search report)
See references of WO 02093209A2
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
WO 02093209 A2 20021121; WO 02093209 A3 20031023; EP 1390783 A2 20040225; JP 2004526331 A 20040826; KR 20040015251 A 20040218; TW 591242 B 20040611; US 2004105170 A1 20040603; US 2004190151 A1 20040930; US 2005122594 A1 20050609; US 2006171020 A1 20060803; US 7126765 B2 20061024; US 7145720 B2 20061205; US 7180667 B2 20070220; US 7382536 B2 20080603
DOCDB simple family (application)
EP 0205050 W 20020508; EP 02738037 A 20020508; JP 2002589833 A 20020508; KR 20037015260 A 20031115; TW 91109726 A 20020509; US 2978805 A 20050105; US 36798903 A 20030212; US 39202706 A 20060329; US 81752704 A 20040401