EP 1390793 A2 20040225 - PIVOTING OPTICAL MICROMIRROR, ARRAY FOR SUCH MICROMIRRORS AND METHOD FOR MAKING SAME
Title (en)
PIVOTING OPTICAL MICROMIRROR, ARRAY FOR SUCH MICROMIRRORS AND METHOD FOR MAKING SAME
Title (de)
KIPPBARER OPTISCHER MIKROSPIEGEL, MATRIXANORDNUNG FÜR SOLCHE MIKROSPIEGEL UND ZUGEHÖRIGES HERSTELLUNGSVERFAHREN
Title (fr)
MICRO-MIROIR OPTIQUE A PIVOT, MATRICE DE TELS MICRO-MIROIRS ET PROCEDE DE REALISATION DUDIT MICRO-MIROIR.
Publication
Application
Priority
- FR 0200545 W 20020213
- FR 0102065 A 20010215
Abstract (en)
[origin: FR2820833A1] The invention concerns a micromirror comprising a fixed part (31), a mobile part (41, 48) including reflecting means (48) and articulating means linking the mobile part to the fixed part. Said micromirror is characterised in that the articulating means are formed by a pivot (47) located beneath the mobile part between the latter and the fixed part and designed to enable the mobile part to move along axes of rotation contained in the mobile part and passing through an axis of the pivot, and wherein the fixed part comprises at least a cavity (36) opposite at least a zone of one end of the mobile part. The invention also concerns an array of pivoting micromirrors and a method for making such micromirrors. Said micromirrors are useful in optical routing or image projection systems.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); B81B 7/04 (2006.01); B81C 1/00 (2006.01); G02B 26/08 (2006.01)
CPC (source: EP US)
B81B 3/0062 (2013.01 - EP US); G02B 26/0841 (2013.01 - EP US); B81B 2201/045 (2013.01 - EP US); B81B 2203/0181 (2013.01 - EP US); B81B 2203/058 (2013.01 - EP US)
Citation (search report)
See references of WO 02065186A2
Citation (examination)
DE 19712201 A1 19981001 - BODENSEEWERK GERAETETECH [DE]
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
FR 2820833 A1 20020816; FR 2820833 B1 20040528; CA 2437816 A1 20020822; EP 1390793 A2 20040225; JP 2004522996 A 20040729; US 2004061961 A1 20040401; WO 02065186 A2 20020822; WO 02065186 A3 20031127
DOCDB simple family (application)
FR 0102065 A 20010215; CA 2437816 A 20020213; EP 02704815 A 20020213; FR 0200545 W 20020213; JP 2002564645 A 20020213; US 46806003 A 20030814