EP 1390794 A2 20040225 - METHOD FOR MAKING AN OPTICAL MICROMIRROR AND MICROMIRROR OR ARRAY OF MICROMIRRORS OBTAINED BY SAID METHOD
Title (en)
METHOD FOR MAKING AN OPTICAL MICROMIRROR AND MICROMIRROR OR ARRAY OF MICROMIRRORS OBTAINED BY SAID METHOD
Title (de)
HERSTELLUNGSVERFAHREN FÜR EINEN OPTISCHEN MIKROSPIEGEL UND MIKROSPIEGEL ODER MATRIXANORDNUNG VON MIKROSPIEGELN
Title (fr)
PROCEDE DE FABRICATION D'UN MICRO-MIROIR OPTIQUE ET MICRO-MIROIR OU MATRICE DE MICRO-MIROIRS OBTENUS PAR CE PROCEDE
Publication
Application
Priority
- FR 0200546 W 20020213
- FR 0102067 A 20010215
Abstract (en)
[origin: FR2820834A1] The invention concerns a method for making an optical micromirror comprising a fixed part, a mobile part, with reflecting means, linked to the fixed part by articulating means. Said method is characterised in that it comprises the following steps: a) producing a stack consisting of a mechanical support (21), a first layer (22) of thermal oxidation material and at least a second layer (26) of material designed to constitute the mobile part; b) providing articulation means (27); c) producing reflecting means (29) on the second layer; d) producing the mobile part by etching at least the second layer of material; e) eliminating the thermal oxidation layer to release said mobile part. The invention is applicable to optical routing or image projection systems.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); B81C 1/00 (2006.01); G02B 26/08 (2006.01)
CPC (source: EP US)
B81B 3/0062 (2013.01 - EP US); G02B 26/0841 (2013.01 - EP US); B81B 2201/045 (2013.01 - EP US); B81B 2203/0181 (2013.01 - EP US); B81B 2203/058 (2013.01 - EP US)
Citation (search report)
See references of WO 02065187A2
Citation (examination)
- DE 19728598 A1 19990204 - BOSCH GMBH ROBERT [DE]
- HORNBECK L.J.: "Deformable-Mirror spatial light modulators", SPIE, vol. 1150, 8 August 1989 (1989-08-08), SAN DIEGO, CA, US, pages 86 - 102, XP000351394
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
FR 2820834 A1 20020816; FR 2820834 B1 20040625; CA 2437817 A1 20020822; EP 1390794 A2 20040225; JP 2004522997 A 20040729; US 2004085606 A1 20040506; US 7022249 B2 20060404; WO 02065187 A2 20020822; WO 02065187 A3 20031127
DOCDB simple family (application)
FR 0102067 A 20010215; CA 2437817 A 20020213; EP 02704816 A 20020213; FR 0200546 W 20020213; JP 2002564646 A 20020213; US 46717403 A 20030814