EP 1390986 A2 20040225 - INTEGRATED TUNABLE CAPACITOR
Title (en)
INTEGRATED TUNABLE CAPACITOR
Title (de)
INTEGRIERTE, ABSTIMMBARE KAPAZITÄT
Title (fr)
CONDENSATEUR ACCORDABLE INTEGRE
Publication
Application
Priority
- DE 0201993 W 20020529
- DE 10126116 A 20010529
Abstract (en)
[origin: DE10126116A1] The invention relates to an integrated tunable capacitor in which the quality is improved by virtue of the fact that, in lieu of source/drain regions, highly doped trough connection regions (6) of a large depth are provided that are configured, for example, as collector deep implantation regions. This results in reducing the series resistance of the tunable capacitor. The integrated tunable capacitor can be used, for example, in integrated voltage-controlled oscillator circuits in which a high quality is demanded.
IPC 1-7
IPC 8 full level
H01L 21/822 (2006.01); H01L 21/8234 (2006.01); H01L 21/8249 (2006.01); H01L 27/04 (2006.01); H01L 27/06 (2006.01); H01L 27/08 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01); H01L 29/94 (2006.01)
CPC (source: EP US)
H01L 27/0808 (2013.01 - EP US); H01L 29/94 (2013.01 - EP US)
Citation (search report)
See references of WO 02097899A2
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
DE 10126116 A1 20020822; EP 1390986 A2 20040225; JP 2004530305 A 20040930; JP 4191028 B2 20081203; US 2004094824 A1 20040520; US 6906904 B2 20050614; WO 02097899 A2 20021205; WO 02097899 A3 20030313
DOCDB simple family (application)
DE 10126116 A 20010529; DE 0201993 W 20020529; EP 02748561 A 20020529; JP 2003500982 A 20020529; US 71266403 A 20031113