EP 1395392 A1 20040310 - IMPROVED METHOD AND APPARATUS FOR BI-DIRECTIONALLY POLISHING A WORKPIECE
Title (en)
IMPROVED METHOD AND APPARATUS FOR BI-DIRECTIONALLY POLISHING A WORKPIECE
Title (de)
VERBESSERTE VERFAHREN UND VORRICHTUNG ZUM BIDIRECTIONALEN POLIEREN VON WERKSTÜCKEN
Title (fr)
PROCEDE ET APPAREIL AMELIORES DESTINES AU POLISSAGE BIDIRECTIONNEL D'UNE PIECE
Publication
Application
Priority
- US 0218827 W 20020612
- US 88073001 A 20010612
- US 12646402 A 20020418
- US 12646902 A 20020418
Abstract (en)
[origin: WO02100594A1] A chemical mechanical polishing apparatus and method uses a portion of a polishing pad (130) that is disposed under tension between a supply spool (160) and a receive spool (162) such that it will not degrade, a single drive system that allows for efficient bi-directional linear motion, and a mechanism that provides tension to either the supply spool or the receive spool and the other spool being locked during processing. If a new section of the polishing pad is needed, the same motor (770) that provided the tension is used to advance the polishing pad a determined amount. Further, during processing, a feedback mechanism (fig 8) is used to ensure that the tension of the polishing pad is consistently maintained.
IPC 1-7
IPC 8 full level
B24B 21/04 (2006.01); B24B 21/22 (2006.01); B24B 37/00 (2006.01); B24B 37/04 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR)
B24B 21/04 (2013.01 - EP); B24B 21/22 (2013.01 - EP); B24B 37/04 (2013.01 - EP KR); H01L 21/304 (2013.01 - KR)
Citation (search report)
See references of WO 02100594A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02100594 A1 20021219; WO 02100594 A8 20030220; AU 2002316240 A1 20021223; CN 1638919 A 20050713; EP 1395392 A1 20040310; JP 2004528998 A 20040924; KR 100665748 B1 20070109; KR 20040025689 A 20040324; TW 552177 B 20030911
DOCDB simple family (application)
US 0218827 W 20020612; AU 2002316240 A 20020612; CN 02815389 A 20020612; EP 02746526 A 20020612; JP 2003503399 A 20020612; KR 20037016337 A 20031212; TW 91112816 A 20020612