EP 1395857 A2 20040310 - METHOD FOR CONTROLLED MODIFICATION OF THE REFLECTIVE QUALITIES OF A MULTI-LAYER
Title (en)
METHOD FOR CONTROLLED MODIFICATION OF THE REFLECTIVE QUALITIES OF A MULTI-LAYER
Title (de)
VERFAHREN ZUR KONTROLLIERTEN MODIFIZIERUNG DER REFLEKTIVEN EIGENSCHAFTEN EINES VIELSCHICHTSYSTEMS
Title (fr)
PROCEDE DE MODIFICATION CONTROLEE DE PROPRIETES REFLECTIVES D'UN MULTICOUCHE
Publication
Application
Priority
- FR 0201830 W 20020531
- FR 0107228 A 20010601
- FR 0109729 A 20010720
Abstract (en)
[origin: WO02097486A2] One aspect of the invention relates to a multi-layered reflective optical system for the reflection of X rays at a low angle of incidence, producing a two-dimensional optical effect. The inventive optical system comprises: a component having a surface which is reflective in such a way that a first optical effect is produced according to a first direction in space; and means for producing a second optical effect according to a second direction in space which is different from the first direction, characterized in that said means for producing a second optical effect are borne by the reflective surface. A second aspect of the invention relates to a method for the production of said optical system.
IPC 1-7
G02B 5/26; G02B 5/28; G03F 1/00; C23C 14/22; G03F 1/14; G02B 5/08
IPC 8 full level
G02B 5/08 (2006.01); G02B 5/10 (2006.01); G02B 5/18 (2006.01); G02B 5/26 (2006.01); G02B 5/28 (2006.01); G03F 7/20 (2006.01); G21K 1/06 (2006.01); G03F 1/00 (2012.01)
CPC (source: EP US)
B82Y 10/00 (2013.01 - EP US); B82Y 40/00 (2013.01 - EP US); G02B 5/0883 (2013.01 - EP US); G02B 5/1838 (2013.01 - EP US); G02B 5/26 (2013.01 - EP US); G02B 5/283 (2013.01 - EP US); G03F 1/24 (2013.01 - EP US); G03F 7/70058 (2013.01 - EP US); G03F 7/70958 (2013.01 - EP US); G21K 1/06 (2013.01 - EP US); G03F 1/26 (2013.01 - EP US)
Citation (search report)
See references of WO 02097485A2
Citation (examination)
- ZIGLER A. ET AL: "Rapid lattice expansion and increased x-ray reflectivity of a multilayer structure du to pulsed laser heating", APPL. PHYS. LETT., vol. 51, no. 23, 7 December 1987 (1987-12-07), pages 1873 - 1875
- ZIGLER A. ET AL: "Increase of multilayer x-ray reflectivity induced by pulsed laser heating", J. APPL. PHYS., vol. 75, no. 12, 15 June 1994 (1994-06-15), pages 8085 - 8089, XP002212712
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02097486 A2 20021205; WO 02097486 A3 20031218; AT E397782 T1 20080615; AU 2002314278 A1 20021209; AU 2002344277 A1 20021209; DE 60226973 D1 20080717; EP 1395857 A2 20040310; EP 1397813 A2 20040317; EP 1397813 B1 20080604; JP 2004529388 A 20040924; US 2005094271 A1 20050505; WO 02097485 A2 20021205; WO 02097485 A3 20030320
DOCDB simple family (application)
FR 0201831 W 20020531; AT 02740845 T 20020531; AU 2002314278 A 20020531; AU 2002344277 A 20020531; DE 60226973 T 20020531; EP 02740845 A 20020531; EP 02743341 A 20020531; FR 0201830 W 20020531; JP 2003500610 A 20020531; US 47881404 A 20040521