EP 1398670 A2 20040317 - A method of aligning a substrate, a computer program and a device manufacturing method
Title (en)
A method of aligning a substrate, a computer program and a device manufacturing method
Title (de)
Methode zum Ausrichten eines Substrates, ein Computerprogramm und ein Verfahren zur Herstellung eines Artikels
Title (fr)
Procédé d'alignement d'un substrat, programme informatique et procédé pour la production d'un dispositif
Publication
Application
Priority
- EP 03255700 A 20030911
- EP 02256420 A 20020913
Abstract (en)
While the alignment beam is focused on a mark on the substrate table the substrate table is moved substantially perpendicularly to the alignment beam. If the image of the mark moves relative to a reference mark, then the substrate and the alignment beam are not perpendicular. The mark on the substrate table is aligned to a plurality of reference marks. At least two substrate marks are then aligned with a single reference mark. Errors due to the inclination of the alignment beam are eliminated from the expansion and rotation values calculated for the substrate.
The alignment beam is adjusted to be perpendicular to a substrate table (WT), after inclination detection of beam. The mask reference marks (M1,M2) are aligned with mark (T1) on table, using alignment beam. One reference mark (M1) of mask is aligned with substrate marks (W1,W2) using alignment beam. Independent claims are also included for the following: (1) device manufacturing method; and (2) substrate alignment computer program.
IPC 1-7
IPC 8 full level
CPC (source: EP)
G03F 9/7003 (2013.01); G03F 9/7015 (2013.01); G03F 9/7088 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
Designated extension state (EPC)
AL LT LV MK
DOCDB simple family (publication)
DOCDB simple family (application)
EP 03255700 A 20030911