EP 1399949 A2 20040324 - DEVICE FOR WET CLEANING DISC-SHAPED SUBSTRATES
Title (en)
DEVICE FOR WET CLEANING DISC-SHAPED SUBSTRATES
Title (de)
VORRICHTUNG ZUM NASSREINIGEN VON SCHEIBENFÖRMIGEN SUBSTRATEN
Title (fr)
DISPOSITIF DE NETTOYAGE PAR VOIE HUMIDE DE SUBSTRATS EN FORME DE DISQUE
Publication
Application
Priority
- DE 10122669 A 20010510
- EP 0204781 W 20020502
Abstract (en)
[origin: WO02091435A2] The invention relates to a device for wet cleaning disc-shaped substrates, especially semiconductor wafers, with the purpose of enabling continuos cleaning of individual wafers in a simple and economical manner. Said device comprises at least one processing container (40) that can be filled with processing liquid and that has a lateral guide (50) for receiving an individual substrate (2) in the container (40); a lifting device (55) in the processing container (40) for introducing and withdrawing a substrate (2), in addition to a receiving device (36) arranged above the processing container, which comprises at least two separate guide devices (92, 93) for receiving a substrate (2), wherein the guide devices (92, 93) can be moved in such a way that they can be oriented with the guide (50) in the processing container (40).
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01)
CPC (source: EP)
H01L 21/67028 (2013.01); H01L 21/67034 (2013.01)
Citation (search report)
See references of WO 02091435A2
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02091435 A2 20021114; WO 02091435 A3 20030327; DE 10122669 A1 20021212; EP 1399949 A2 20040324
DOCDB simple family (application)
EP 0204781 W 20020502; DE 10122669 A 20010510; EP 02727587 A 20020502