EP 1402289 A4 20051207 - ANISOTROPIC ETCHING OF OPTICAL COMPONENTS
Title (en)
ANISOTROPIC ETCHING OF OPTICAL COMPONENTS
Title (de)
ANISOTROPES ÄTZEN OPTISCHER KOMPONENTEN
Title (fr)
GRAVURE ANISOTROPIQUE DE COMPOSANTS OPTIQUES
Publication
Application
Priority
- US 0215519 W 20020515
- US 85969301 A 20010517
- US 85929701 A 20010517
- US 85964701 A 20010517
- US 85923901 A 20010517
- US 85933801 A 20010517
- US 85927901 A 20010517
- US 85976901 A 20010517
- US 85932101 A 20010517
- US 85966301 A 20010517
- US 85978601 A 20010517
- US 29361501 P 20010525
- US 29720801 P 20010608
- US 99137101 A 20011110
Abstract (en)
[origin: WO02093211A1] An anisotropically etched prism assembly including a device portion (5904), a light coupling portion (5110) and an alignment portion (5106). The anisotropically etched prism assembly having a plurality of optical devices arranged in a first fixed pattern. Each pair of said plurality of optical devices spaced a first prescribed distance apart. The light coupling portion (5110) including a plurality of anisotropically etched prisms arranged in a second fixed pattern so as to correspond with a respective one of the plurality of optical devices. Each one of the pairs of said plurality of anisotropically etched prisms are spaced a second prescribed distance apart, the second prescribed distance substantially equals the first prescribed distance. The alignment portion (5106) aligns the light coupling portion and the device portion.
IPC 1-7
IPC 8 full level
G02B 5/04 (2006.01); G02B 6/10 (2006.01); G02B 6/12 (2006.01); G02B 6/122 (2006.01); G02B 6/124 (2006.01); G02B 6/28 (2006.01); G02B 6/34 (2006.01); G02B 6/43 (2006.01); G02B 27/28 (2006.01); G02F 1/025 (2006.01); G02F 1/295 (2006.01); H01L 27/12 (2006.01); G02B 6/42 (2006.01); G02F 1/01 (2006.01); G02F 1/015 (2006.01)
CPC (source: EP)
B82Y 20/00 (2013.01); G02B 5/045 (2013.01); G02B 6/10 (2013.01); G02B 6/12004 (2013.01); G02B 6/12007 (2013.01); G02B 6/12011 (2013.01); G02B 6/12014 (2013.01); G02B 6/12033 (2013.01); G02B 6/1225 (2013.01); G02B 6/1228 (2013.01); G02B 6/124 (2013.01); G02B 6/272 (2013.01); G02B 6/2861 (2013.01); G02B 6/4246 (2013.01); G02B 27/285 (2013.01); G02F 1/025 (2013.01); G02F 1/295 (2013.01); H01L 27/1203 (2013.01); G02B 6/278 (2013.01); G02B 6/2931 (2013.01); G02B 6/29311 (2013.01); G02B 6/29314 (2013.01); G02B 6/29323 (2013.01); G02B 6/29349 (2013.01); G02B 6/29356 (2013.01); G02B 6/29394 (2013.01); G02B 6/29395 (2013.01); G02B 6/29398 (2013.01); G02B 6/34 (2013.01); G02B 6/4232 (2013.01); G02B 6/43 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12097 (2013.01); G02B 2006/12104 (2013.01); G02B 2006/12107 (2013.01); G02B 2006/12114 (2013.01); G02B 2006/12135 (2013.01); G02B 2006/12161 (2013.01); G02B 2006/12164 (2013.01); G02B 2006/12176 (2013.01); G02F 1/0147 (2013.01); G02F 1/0152 (2021.01); G02F 2201/20 (2013.01)
Citation (search report)
- [Y] US 6021239 A 20000201 - MINAMI KOHJI [JP], et al
- [X] US 5568574 A 19961022 - TANGUAY JR ARMAND R [US], et al
- [X] US 5677970 A 19971014 - NASHIMOTO KEIICHI [JP]
- [X] US 5418871 A 19950523 - REVELLI JR JOSEPH F [US], et al
- [X] US 3838908 A 19741001 - CHANNIN D
- [A] DE 19510802 A1 19960926 - MIKOS UNI ERLANGEN NUERNBERG [DE]
- [XAY] KOSTER A ET AL: "A NEW TYPE OF SPATIAL LIGHT MODULATOR AT 1.3 UM ON SILICON-ON- INSULATOR SUBSTRATE", November 1997, ANNALES DES TELECOMMUNICATIONS - ANNALS OF TELECOMMUNICATIONS, PRESSES POLYTECHNIQUES ET UNIVERSITAIRES ROMANDES, LAUSANNE, CH, PAGE(S) 613-626, ISSN: 0003-4347, XP000730485
- [A] CHIA-CHI WANG ET AL: "ULTRAFAST, ALL-SILICON LIGHT MODULATOR", OPTICS LETTERS, OPTICAL SOCIETY OF AMERICA, WASHINGTON, US, vol. 19, no. 18, 15 September 1994 (1994-09-15), pages 1453 - 1455, XP000472099, ISSN: 0146-9592
- See references of WO 02093211A1
Designated contracting state (EPC)
AT BE CH DE FR GB LI
DOCDB simple family (publication)
WO 02093211 A1 20021121; CA 2449106 A1 20021121; EP 1402289 A1 20040331; EP 1402289 A4 20051207
DOCDB simple family (application)
US 0215519 W 20020515; CA 2449106 A 20020515; EP 02734448 A 20020515