EP 1403903 A3 20050511 - Orbitron-Pumpe.
Title (en)
Orbitron-Pumpe.
Title (de)
Orbitron-Pumpe
Title (fr)
Pompe ionique de type Orbitron.
Publication
Application
Priority
DE 10241549 A 20020905
Abstract (en)
[origin: EP1403903A2] The miniature electron vacuum pump (10) has an emitter (22), extractor (20) connected to metallic foil (16) on glass insulation (14) and silicon base (12) on which the anode (26) is mounted to form a vacuum chamber (24) with an insulated (30) titanium cathode (28).
IPC 1-7
IPC 8 full level
H01J 41/18 (2006.01)
CPC (source: EP)
H01J 41/18 (2013.01)
Citation (search report)
- [A] WO 9639582 A1 19961212 - COLOR PLANAR DISPLAYS INC [US]
- [A] DE 4137527 A1 19930519 - SIEMENS AG [DE]
- [A] US 3244969 A 19660405 - HERB RAYMOND G, et al
- [A] US 3339106 A 19670829 - REDHEAD PAUL A
- [A] US 6107745 A 20000822 - MOUGIN STEPHANE [FR], et al
- [AD] HELY H ET AL: "ENTWICKLUNG EINER KLEINEN DIFFERENTIELL GEPUMPTEN FELDEMISSIONS-ELEKTRONENQUELLE DEVELOPMENT OF A SMALL DIFFERENTIALLY PUMPED FIELD-EMISSION SOURCE", OPTIK, WISSENSCHAFTLICHE VERLAG GMBH.STUTTGART, DE, vol. 49, no. 1, 1977, pages 127 - 132, XP008042918, ISSN: 0030-4026
- [A] D. TEMPLE: "recent progress in field emitter array development for high performance applications", MATERIALS SCIENCE AND ENGINEERING, vol. r24, 1999, pages 185 - 239, XP002320281
- [A] R.BAPTIST ET AL.: "bayard-alpert vacuum gauge with microtips", JOURNAL VACUUM SCIENCE TECHNOLOGY, vol. b14, no. 3, 1996, XP002320282
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1403903 A2 20040331; EP 1403903 A3 20050511; DE 10241549 A1 20040318; DE 10241549 B4 20040722
DOCDB simple family (application)
EP 03015579 A 20030711; DE 10241549 A 20020905